Including Means Varying Gas Flow To Control Saturation Or Dispersion Patents (Class 96/257)
  • Patent number: 11071191
    Abstract: An extreme ultraviolet radiation source is provided, including a vessel and a gas scrubber. The vessel has a gas inlet from which a cleaning gas is supplied into the vessel and a gas outlet from which the cleaning gas exits the vessel. The gas scrubber is disposed within the vessel, arranged such that the cleaning gas leaves the vessel through the gas outlet after flowing through the gas scrubber. The gas scrubber has a number of gas passages to allow the cleaning gas to flow through, and the sizes of the gas passages vary according to the distance between each of the gas passages and the gas outlet.
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: July 20, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
    Inventors: Chi Yang, Sheng-Ta Lin, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng
  • Publication number: 20150068399
    Abstract: A device evacuates a chamber and purifies the gas extracted from said chamber of any foreign substances. The device comprises a dry-condensing vacuum pump having an input connected to the chamber to be evacuated and is suitable for maintaining the input pressure at a constant level at the output despite variable conditions. An intermediate line which connects to the output of the dry-condensing vacuum pump and a liquid ring vacuum pump, the input of which is connected to the intermediate line, are additionally provided. A corresponding method makes it possible to purify the gas of any foreign substances reliably and effectively.
    Type: Application
    Filed: December 12, 2012
    Publication date: March 12, 2015
    Inventors: Heiner Kösters, Uwe Gottschlich
  • Patent number: 8628603
    Abstract: A method for treating a process gas with a liquid comprises contacting a process gas with a hygroscopic working fluid in order to remove a constituent from the process gas. A system for treating a process gas with a liquid comprises a hygroscopic working fluid comprising a component adapted to absorb or react with a constituent of a process gas, and a liquid-gas contactor for contacting the working fluid and the process gas, wherein the constituent is removed from the process gas within the liquid-gas contactor.
    Type: Grant
    Filed: September 23, 2011
    Date of Patent: January 14, 2014
    Assignee: Energy & Enviromental Research Center Foundation
    Inventors: Christopher L. Martin, Ye Zhuang
  • Patent number: 8382882
    Abstract: An air pollution control apparatus according to an embodiment of the present invention includes: a stack that discharges flue gas discharged from a boiler outside; a blower that is provided downstream of the stack and draws in the flue gas; and a CO2 recovering apparatus that recovers CO2 in the flue gas drawn in by the blower. The stack includes a controlling unit that suppresses release of the flue gas outside from the stack and suppresses inflow of atmosphere to the stack, and the controlling unit is a channel forming unit that forms a serpentine channel through which the flue gas and the atmosphere in the stack flow.
    Type: Grant
    Filed: May 17, 2012
    Date of Patent: February 26, 2013
    Assignee: Mitsubishi Heavy Industries, Ltd.
    Inventor: Masaki Iijima
  • Patent number: 8246732
    Abstract: An exhaust gas cleaning apparatus according to the present invention includes a wall member configured to form a gas passage for allowing an exhaust gas to pass therethrough, and a mist nozzle and a water film nozzle disposed in the gas passage. The mist nozzle forms mist in the gas passage, and the water film nozzle forms water film in the gas passage. The mist nozzle is disposed further toward the upstream side in a flowing direction of the exhaust gas than the water film nozzle. Plural sets of the mist nozzle and the water film nozzle may be provided.
    Type: Grant
    Filed: July 8, 2008
    Date of Patent: August 21, 2012
    Assignee: Ebara Corporation
    Inventors: Hiroyuki Arai, Kotaro Kawamura, Makoto Kashiwagi
  • Patent number: 8202354
    Abstract: An air pollution control apparatus according to an embodiment of the present invention includes: a stack that discharges flue gas discharged from a boiler outside; a blower that is provided downstream of the stack and draws in the flue gas; and a CO2 recovering apparatus that recovers CO2 in the flue gas drawn in by the blower. The stack includes a controlling unit that suppresses release of the flue gas outside from the stack and suppresses inflow of atmosphere to the stack, and the controlling unit is a channel forming unit that forms a serpentine channel through which the flue gas and the atmosphere in the stack flow.
    Type: Grant
    Filed: October 19, 2009
    Date of Patent: June 19, 2012
    Assignee: Mitsubishi Heavy Industries, Ltd.
    Inventor: Masaki Iijima
  • Patent number: 7854791
    Abstract: A method and apparatus are provided for improving the efficiency of an aqueous froth filter. An array of saturated mesh assemblies interacts with an incoming contaminated air stream. As the air stream flows through the saturated mesh assemblies, an aqueous froth is generated immediately downstream of each mesh assembly. As the bubbles of the froth move downstream towards the next saturated mesh assembly, the velocity of the air stream causes at least some of the bubbles to burst. The bursting bubbles rupture into hundreds or thousands of micro-droplets. The micro-droplets are used together with the aqueous froth to coalesce with or otherwise bind with contaminants in the air stream. An optional feature is that massive particles greater than three microns in diameter are removed by inertial impaction, whereby those heavy particles collide with the walls of serpentine shaped vanes of a mist eliminator. The method and apparatus are capable of filtering chemical and biological warfare agents out of an air stream.
    Type: Grant
    Filed: March 28, 2007
    Date of Patent: December 21, 2010
    Assignee: Westec Environmental Solutions LLC
    Inventor: Roy J. Pellegrin
  • Publication number: 20090320688
    Abstract: The present invention is directed to methods for carbon dioxide from air, which comprises exposing solvent covered surfaces to air streams where the airflow is kept laminar, or close to the laminar regime. The invention also provides for an apparatus, which is a laminar scrubber, comprising solvent covered surfaces situated such that they can be exposed to air streams such that the airflow is kept laminar.
    Type: Application
    Filed: September 9, 2009
    Publication date: December 31, 2009
    Inventors: Klaus S. Lackner, Allen Wright
  • Publication number: 20080006154
    Abstract: A process for producing a solution of a gas in a liquid in which the gas is soluble, the solution having a predetermined concentration up to saturation. The gas and the liquid are brought together under controlled supply in a proportion corresponding to the predetermined concentration of the solution, and the gas and the liquid are caused to form a stream passing through a common conduit. The gas and the liquid in the stream are caused to intermix under the action of gravity, and the intermixing is repeated before the gas and the liquid have separated, so that the gas is substantially absorbed in the liquid, forming a gas-liquid solution of the predetermined concentration. The stream may be brought into turbulence for intensifying the intermixing of the gas and the liquid. An apparatus for performing the process comprises a conduit including a continuous tubular coil formed with a plurality of upwardly and downwardly directed sections.
    Type: Application
    Filed: December 16, 2004
    Publication date: January 10, 2008
    Applicant: OUTOKUMPU OYJ
    Inventors: Robert Johansson, Yngve Lundgren, Sam Marklund
  • Patent number: 6503450
    Abstract: Improvements to integrated blood pump/oxygenator having a rotating hollow fiber bundle assembly that both oxygenates and pumps blood are provided. An inner member arranged along a central axis of the device accelerates blood entering the fiber bundle to reduce microbubble generation and blood trauma. Shearing loads imposed on the fiber elements of the fiber bundle are reduced by the addition of a reinforcement structure, while the gas flow path is configured to reduce flooding and loss of oxygenation efficiency due to occasional rupture of fiber elements.
    Type: Grant
    Filed: December 30, 1999
    Date of Patent: January 7, 2003
    Assignee: Cardiovention, Inc.
    Inventors: Thomas A. Afzal, Jean-Pierre Dueri, Alex Leynov, Anthony Makarewicz, Alec A. Piplani, Greg Potts
  • Patent number: 6454999
    Abstract: An integrated blood pump/oxygenator having a rotating hollow fiber bundle assembly that both oxygenates and pumps blood is provided that includes a plurality of partitions disposed within or about the fiber bundle assembly to lengthen the flow path of blood passing through the fiber bundle. Alternatively, or in addition, blood flow paths may be lengthened and oxygenation improved by providing internal recirculation paths within the pump/oxygenator, which also advantageously may be used to reduce blood trauma caused by stagnation nearing moving parts and heat build-up.
    Type: Grant
    Filed: October 29, 1999
    Date of Patent: September 24, 2002
    Assignee: Cardiovention, Inc.
    Inventors: Mehrdad Farhangnia, Alex Leynov, Joseph Loeffler, Alec A. Piplani, Greg Potts, Christian Skieller
  • Patent number: 6420187
    Abstract: The present invention is an improvement to the method and apparatus for measuring volatile compounds in an aqueous solution. The apparatus is a chamber with sides and two ends, where the first end is closed. The chamber contains a solution volume of the aqueous solution and a gas that is trapped within the first end of the chamber above the solution volume. The gas defines a head space within the chamber above the solution volume. The chamber may also be a cup with the second end. open and facing down and submerged in the aqueous solution so that the gas defines the head space within the cup above the solution volume. The cup can also be entirely submerged in the aqueous solution. The second end of the. chamber may be closed such that the chamber can be used while resting on a flat surface such as a bench. The improvement is a sparger for mixing the gas with the solution volume. The sparger can be a rotating element such as a propeller on a shaft or a cavitating impeller.
    Type: Grant
    Filed: March 19, 1999
    Date of Patent: July 16, 2002
    Assignee: Battelle Memorial Institute
    Inventors: Tyler J. Gilmore, Kirk J. Cantrell, George R. Holdren, Jr.
  • Patent number: 6391621
    Abstract: To provide a process for treating gas for decomposing organic solvent and/or other organic gas contained in exhaust gas effectively and simply at low costs to remove the decomposition product of organic gas by applying other process. The gas can be treated very effectively by decomposing or removing a target gas component dissolved in liquid capable of treating the gas, preferably, by applying microbial treatment, after bringing the gas rising into contact with the liquid falling in a gas treatment tower wherein part of the gas (branched gas ) is admixed with the liquid before feeding the liquid into the tower.
    Type: Grant
    Filed: March 3, 2000
    Date of Patent: May 21, 2002
    Assignee: Fuji Photo Film Co., Ltd.
    Inventor: Yasuhito Naruse
  • Patent number: 6379618
    Abstract: Improvements to integrated blood pump/oxygenator having a rotating hollow fiber bundle assembly that both oxygenates and pumps blood are provided. A plurality of vanes arranged along a central shaft of the device increase pressure near the center of the fiber bundle to prevent microbubble generation and blood trauma. Shearing loads imposed on the fiber elements of the fiber bundle are reduced by the addition of a reinforcement structure, while the gas flow path is configured to minimize flooding and loss of oxygenation efficiency due to occasional rupture of fiber elements. Blood trauma may be further reduced by contouring the vanes and other components of the device.
    Type: Grant
    Filed: December 30, 1998
    Date of Patent: April 30, 2002
    Assignee: Cardiovention, Inc.
    Inventors: Alec A. Piplani, Anthony Makarewicz, Jean-Pierre Dueri, Thomas A. Afzal
  • Patent number: 6202990
    Abstract: A dry spray tower unattended by generation of waste water has a top provided with a gas inlet port, an expanded portion extending downwardly from the top which gradually enlarges, and spray nozzles attached to the expanded portion or a portion immediately downstream from the expanded portion to spray water and/or an absorbing solution, thereby cooling and moistening a gas and/or removing a harmful component from the gas. A gas distributing device is disposed in or around the expanded portion at a position upstream from the spray nozzles for making the downward component of flow velocity of the gas faster at the peripheral portion of the spray tower than at the central portion thereof, whereby sprayed liquid droplets are prevented from colliding with the inner wall of the tower.
    Type: Grant
    Filed: August 17, 1994
    Date of Patent: March 20, 2001
    Assignee: Ebara Corporation
    Inventors: Masahiro Izutsu, Kenji Fujita, Masashi Ohbuchi
  • Patent number: 5863316
    Abstract: A recirculating fume scrubber system in which fume is evolved from an aqueous bath in a process vessel, such as an HCl pickling tank, and the evolved fume is scrubbed with water and then the scrubbed gas is divided into two portions, one of which is released to a stack vented to atmosphere and the other portion is recirculated to the scrubber.
    Type: Grant
    Filed: July 21, 1997
    Date of Patent: January 26, 1999
    Assignee: Danieli Wean, Division of Danieli Corporation
    Inventors: Richard K. Lordo, Stephen L. Feldbauer, Timothy L. Cox