Abstract: A cyclone dust collector of a vacuum cleaner includes a lower cyclone body for initially separating dust entrained in air drawn in through an air suction port, an upper cyclone body for separating fine dust entrained in the air that has been initially filtered in the lower cyclone body, and a central air path for guiding the air which is filtered in the upper cyclone body along a center axis line, and discharging the air through an air discharge port in the lower cyclone body. The capability of the vacuum cleaner can be improved by circulating the drawn in air having the entrained dust in the lower and upper cyclone bodies, and separately and sequentially collecting the dust at least partially based on the particle size thereof.

Abstract: Methods for extracting and compressing an inert gas from an exhaust gas of an engine relate to providing an inert gas processing system including a multi-stage gas compressor to receive the exhaust gas from an exhaust gas processing system, a cooling and extraction system to receive the exhaust gas from each stage of the multi-stage gas compressor and remove liquids from the exhaust gas, and a controller to monitor operation of the inert gas processing system. The methods include processing the exhaust gas before each stage of the multi-stage gas compressor to clarify the inert gas in the exhaust gas, processing the exhaust gas after each stage of the multi-stage gas compressor to clarify the inert gas in the exhaust gas and compressing the inert gas processed for export from the inert gas processing system.

Abstract: An inertial gas-liquid separator and method is provided, including variable orifice jet nozzle structure having a variable orifice area dependent upon axial movement of a plunger relative to a housing sleeve, and in another embodiment having first and second flow branches, with the first flow branch being continuously open, and the second flow branch having a variable flow controller controlling flow therethrough.

Abstract: An apparatus and method for producing products using a fluid, which enables one to control the quality of the fluid from the point of production to the point of use, monitored on a microbiological, physical, and chemical basis. At least one sensor for the acquisition of purity information and a system for storing such purity information is included.

Abstract: An apparatus for recycling the stripper solutions with higher recycling rate is disclosed. The apparatus includes a stripper condenser; a first buffer tank; a second buffer tank connecting to said stripper condenser by a first pipe and connecting to said first buffer tank by a second pipe; a recycling device connecting to said first buffer tank by a fourth pipe; a first pump mounted on said first pipe; a second pump mounted on said second pipe; a concentration detector mounted in said stripper condenser; and a controller electrically connected to said concentration detector, said flow meter, and said liquid level sensor for receiving the signals therefrom, and electrically connected to said first pump and said second pump for sending on-off messages to said second pump.

Abstract: In an exhaust gas cleaning apparatus (30) in which a before and after differential pressure (?P) of a filter (32) used to trap particulates is detected for regeneration of the filter (32), a time at which, during filter regeneration, the temperature of the outlet section of the filter (32) falls below the temperature of the inlet section thereof (?T>M), using a first temperature sensor (36) and a second temperature sensor (37), is determined as being the timing of the completion of the regeneration of the filter (32). The value of the before and after differential pressure (?P) at the time of this regeneration completion is used to estimate the quantity of residual ash in the filter (32), and when this estimated residual ash quantity is the same as, or greater than, a prescribed value (PX), a replacement warning signal (K3) is output urging replacement of the filter (32).

Abstract: A method and system for detecting and predicting air filter condition for an air handling system operates by determining a system resistance to air flow. The system resistance is utilized to determine a detection statistic indicative of current filter condition and to predict remaining life of the air filter. The system resistance is determined using models that approximate the expected operation of the air handling system. The approximation is then compared to actual values to obtain a difference. Once the difference between the approximated value exceeds a threshold value, an alarm is initiated that is indicative of system resistance. The remaining air filter life is then determined by using historically gathered data, or by using a known degradation rate of the air filter. Once the remaining life of the air filter is estimated, replacement can be scheduled that would coincide with other maintenance.

Abstract: A real-time monitoring system that monitors various aspects of the operation of a refrigerant-cycle system is described. In one embodiment, the system includes a processor that measures power provided to the refrigerant-cycle system and that gathers data from one or more sensors and uses the sensor data to calculate a figure of merit related to the efficiency of the system. In one embodiment, the sensors include one or more of the following sensors: a suction line temperature sensor, a suction line pressure sensor, a suction line flow sensor, a hot gas line temperature sensor, a hot gas line pressure sensor, a hot gas line flow sensor, a liquid line temperature sensor, a liquid line pressure sensor, a liquid line flow sensor. In one embodiment, the sensors include one or more of an evaporator air temperature input sensor, an evaporator air temperature output sensor, an evaporator air flow sensor, an evaporator air humidity sensor, and a differential pressure sensor.

Abstract: A technique for use in monitoring the condition of an air filter in an electronics system involves receiving temperature readings gathered over time by a temperature sensor located in the electronics system that houses the air filter, concluding that at least one of the readings exceeds a reference temperature, concluding that a rate of change of at least some of the readings does not exceed a reference rate, and generating an alarm message indicating that the air filter needs attention.

Abstract: An inert gas generating system for generating inert gas on a vehicle having a fuel tank and a fuel tank vent. The system includes an inlet for receiving a flow of gas having a nitrogen component and an oxygen component from a gas source, a heat exchanger downstream from the inlet and in fluid communication with the inlet for cooling gas received from the inlet, and a gas separation module downstream from the heat exchanger and in fluid communication with the heat exchanger for separating gas received from the heat exchanger into a nitrogen-enriched gas flow and an oxygen-enriched gas flow. The gas separation module is adapted to deliver nitrogen-enriched gas from the nitrogen-enriched gas flow to the fuel tank without delivering the nitrogen-enriched gas through the fuel tank vent. The gas separation module is also adapted to deliver nitrogen-enriched gas from the nitrogen-enriched gas flow to the fuel tank vent.

Abstract: An air cleaner and method of controlling an operation of the same is disclosed. The air cleaner includes a cabinet having an inlet and an outlet; a filter assembly removing dust and smell particles from a room air; a fan; a sensor assembly sensing the composition of the room air; a supplier assembly providing at least one of insufficient components of the room air to a cleaned air; and a controller controlling the supplier assembly on the basis of data regarding the composition of the room air. In another aspect, the method of controlling the operation of the air cleaner includes steps of sensing a room air; measuring insufficient components of the room air and the amount thereof; and providing at least one of the insufficient components of the room air to a cleaned air.

Abstract: A movable spray-painting stand includes a worktable provided with four casters and having a wind-exhausting device and a filtering device assembled thereon. The wind-exhausting device has an air inlet communicating with the wind outlet of the filtering device. A separating device is provided in front of the wind inlet of the filtering device to form a spray painting space. A collapsible work frame is pivotally assembled with the work table and positioned under the separating device, able to be positioned in the spray painting space after articles to be spray painted are placed on its upper plate. The spray painting stand can be moved around freely, and the exhaust and the odor of paint produced during spray painting can be filtered by the filtering device, conforming to environmental protection and ensuring workers' health.

Abstract: The present invention provides device and method for controlling air cleaning operation, in which an air conditioner with an air cleaner is made to clean air effectively proper to different pollutants. The device includes a memory having a plurality of operation modes set and stored therein for controlling operation of a fan proper to characteristics of air pollution sources, first means for selecting one of the plurality of operation modes stored in the memory, and a controlling part for controlling the fan according to a control program of the operation mode. The method includes the steps of selecting one of a plurality of operation modes, changing setting of an operation time period of the selected operation mode, reading the selected operation mode from the memory, and changing the operation time period of the operation mode to the set value, and controlling the fan according to the value of the changed operation time period and the value of the operation mode read from the memory.

Abstract: An engine exhaust gas purification device is disclosed. The purification device has a filter (13) which traps particulate matter contained in the exhaust gas from an engine; a differential pressure detection sensor (16) which detects a differential pressure of the filter; a sensor (14, 15, 21, 31, 33) which detects an engine running state, and a microcomputer (22). The microcomputer (22) is programmed to compute an estimated ash amount ASH_a of the filter based on the detected differential pressure; compute an oil consumption amount OC_total based on the detected engine running state; compute an ash density DENS_ASH from the oil consumption amount OC_total and estimated ash amount ASH_a, and compute an ash amount ASH of the filter based on the oil consumption amount OC_total and ash density DENS_ASH.

Abstract: A control unit for controlling operation of a fuel-fired burner includes a housing having an air inlet which is open to an interior chamber of the housing. An air pump is positioned in the interior chamber of the housing and has an air inlet which is open to the interior chamber of the housing. The air pump generates reduced air pressure in the interior chamber which draws air into the housing and into the pump's inlet. This flow of air cools an electronic controller along with other components position in the housing. The air pump may be operated to draw air from the interior chamber of the housing and supplies the air to a combustion chamber of the fuel-fired burner to facilitate operation of the burner. An associated method of advancing air to a fuel-fired burner is also disclosed.

Abstract: A semiconductor manufacturing process facility requiring use therein of air exhaust for its operation, such facility including clean room and gray room components, with the clean room having at least one semiconductor manufacturing tool therein, and wherein air exhaust is flowed through a region of the clean room. The facility includes an air exhaust treatment apparatus arranged to (i) receive air exhaust after flow thereof through said region of said clean room, (ii) produce a treated air exhaust, and (iii) recirculate the treated air exhaust to an ambient air environment in the facility, e.g., to the gray room of the facility.

Abstract: Self cleaning air filtration machine and a method for using same comprising; a filter with a motor driven belt or disk or counter rotating disks that are perforated, a spray bar, a recirculation pump and supply line, a wet tank, a ultrasonic transducer, ultraviolet submersible bulbs, a water fill port, a liquid level sensor, a liquid and sediment drain port, and a power source. A preferred embodiment includes a subsonic transducer on the wet tank. A preferred embodiment includes a air diffuser, a toxic and noxious gas detection and recognition and radiation detection with automatic safety shut down and audible and visual alarm, a ultraviolet saturation chamber. A preferred embodiment includes a secondary wet filter, a secondary air diffuser, a secondary ultraviolet saturation chamber. A preferred embodiment includes a inline dryer assembly.

Abstract: A device for detecting a failure of a filter used to clean a gas stream, in particular an exhaust gas stream, of soot particulates, including a chamber which is insertable into the gas stream to be cleaned in addition to the filter and which is at least partially closed by a filter body and has at least one opening through which gas entering the chamber through the filter body can exit the chamber, at least one gas sensor for determining the concentration of at least one component of the gas to be cleaned being arranged in the chamber, and at least one second gas sensor for determining the concentration of the at least one component of the gas to be cleaned being arranged outside the chamber.

Abstract: A protective system having an upstream detection subsystem to detect a contaminant in an airflow and to provide a contaminant signal, an upstream detection subsystem, a filtration subsystem to filter the contaminant from the airflow, a valve adapted to allow selective routing of the airflow, and a control system adapted to control the valve to route the airflow through the protective system upon receiving the contaminant signal from the upstream detection subsystem. In one embodiment, the upstream detection subsystem includes at least two different types of detectors for detecting same type of contaminants. In another embodiment, the upstream detection subsystem is adapted to detect a contaminant, and a daughter compound. In another embodiment, the protective system includes a downstream detection subsystem. In yet another embodiment, the protective system includes a vehicle data link subsystem.

Abstract: The invention concerns a device and method for monitoring the integrity of filtering installations consisting of a filter housing (1) designed to perform integrity tests and for filtration, equipped with a plurality of filter elements (2, 3) and an electronic testing and monitoring unit (4) designed for monitoring and performing integrity tests, said filter elements (2, 3) having each a storage element and a communicating part (7) being connected to the monitoring and testing unit arranged in the filtering housing, whereon data of said electronic storage elements can be read.

Abstract: A trap device including at least one substance delivery element for introducing a substance therein is disclosed. The delivered substance may influence the nature of deposits that have formed within the trap device, may influence the formation of deposits within the trap device, or may cause a precipitate to form. Deposit interaction elements may be employed to influence the distribution or redistribution of deposits within the trap device. Deposit interaction elements may effect thermal conditions, introduce substances, or physically interact with deposits within the trap device. Further, a storage region within the trap device may be used to accumulate deposits. In one embodiment, a substantially continuous path through the trap device may be maintained or preserved so that deposits form within the trap device except substantially along the path. The present invention also encompasses a method of operation of a trap device as well as a system incorporating same.

Abstract: An apparatus for separating and converting exhaust particulates from a stream of exhaust gas, especially a diesel engine, into gaseous substances, in which the exhaust gas is guided through a honeycomb filter (6) made from a porous ceramic material whose axially extending channels (1, 2) are open merely at one face side of the filter and are closed off at the respective other face side, and a voltage is applied to electrodes (3, 4) extending parallel to the channels (1, 2) of the honeycomb filter (6). The closure of the channels (1, 2) at the face side is made in such a way that the channels (1, 2) each extending at the same normal distance from one of the electrodes (3, 4) are either all open or all closed off at their face side (9). The channels (1, 2) are mutually offset in a brickwork-like way.

Abstract: A personal tabletop-type air cleaner is provided which is user-friendly and can improve smoke sucking efficiency in a simple configuration. The disclosed personal tabletop-type air cleaner has a front opening portion to suck air containing smoke of a cigarette, a blower to forcedly feed air having been sucked into the front opening portions in a centrifugal manner, a pair of right and left peripheral opening portions each being placed in a fringe portion on the right and the left at a front of the air cleaner and forming an air curtain by emitting air fed forcedly from the blower ahead of the front of the air cleaner, a dust collecting filter being placed between the front opening portion and the blower to remove cigarette odor, and a deodorizing filter being placed between the blower and each peripheral opening portion making up the pair of right and left peripheral opening portions to remove cigarette odor.

Abstract: A filter maintenance monitoring method and a filter maintained thereby are provided, by which re-use of the filter by wash is smoothly and efficiently promoted. The filter includes that loaned from a filter owner to a filter user. The filter used for a predetermined purpose and having clogging of filter cloth by filtering dust in air is recovered to be washed for re-use. History data base stored in a storage portion of a computer is renewed based on wash history of the recovered filter. Then, re-use of the filter is decided based on the renewed history data base. Changes in the filter by damages or deterioration corresponding to the wash history are automatically grasped. Thereby, an efficient filter maintenance is realized.

Abstract: The present invention is directed to a filter cleaning device, in particular, diesel particulate filters. In one embodiment, the device comprises a source of high pressure fluid and means to transport the fluid to a nozzle or nozzles; an actuator for moving the nozzles; a controller with logic for instructing the actuator to automatically move the nozzle or nozzles across the surface of the filter; a collection device and suction device downstream of the filter; and ducting to transport the fluid between parts of the system. In one embodiment, a second collection device is used downstream of the suction device to provide additional particulate removal. There are three methods proposed for providing high pressure cleaning fluid to the filter face: 1) rotating the filter and rotating the jet about an axis outside of the filter; 2) moving a nozzle in two perpendicular directions (i.e., x-y); and 3) rotating a rectangular nozzle about the central axis of the filter.

Abstract: A method of operating a fuel-fired burner of an emission abatement assembly includes supplying a reduced amount of fuel to the fuel-fired burner in response to detection of a burner shutdown request. Such a reduced fuel supply continues for a predetermined time period after which fuel is no longer supplied to the burner. The supply of both combustion air and atomization air, along with spark generation, continues for a period of time after the fuel is shutoff. An emission abatement assembly is also disclosed.

Abstract: A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalchols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.

Abstract: A slurry monitoring system is provided. A filter encompasses a filter chamber containing a purge piston. During a monitor operation, the purge piston is retracted, and slurry enters the filter chamber through the filter, then passes into an outlet pipe, where a characteristic of the slurry is monitored by a monitoring device. During a purge operation, a flush valve is opened to allow water to pass into the filter chamber through an inlet pipe. The purge piston is extended to force filtered slurry from the filter chamber. The water dilutes filtered slurry remaining in the filter chamber. The flush valve is then closed and the purge piston retracted. This forces diluted slurry to pass out of the filter. This purges the filter. Diluted slurry also passes into the outlet pipe, which purges the outlet pipe and monitoring device.

Abstract: An automated method for suppressing fugitive dust dissemination is disclosed. The method provides for automated measurement of dust levels at remote locations, transmission of the measurements to a centralized monitoring and control system which sends a signal to remote dust suppression treatment application apparatus which apply the appropriate dust suppression treatment chemicals.

Abstract: A filter structure of a vehicle air conditioner comprises a filter cartridge provided with a plurality of filter papers within a case and a light source. The light source is provided at a position within the filter papers for radiating light toward one side of the case. The light is blocked when pollutants deposited on the filter papers are enough to cause a contaminated state of the filer to reach a preset state. A display section is provided on the case for transmitting the light, radiated from the light source, to be visually checked on the external side. Therefore, the filter structure allows a driver to check a proper exchange time of the filter visually through a display section in which a display state changes according to a contaminated state of the filter.

Abstract: A particulate filter for purifying exhaust gases of an internal combustion engine, in particular of a diesel engine, comprises a filtering body and heating elements for initiating combustion of soot particles accumulated on and in the filtering body. The heating elements comprise at least a hot spot ceramic ignitor (3). The invention is applicable in the automotive industry.

Abstract: A dust collection apparatus includes a container and a suction pump that sucks dust and transports it into the container. A filter is provided on a side surface of the container. This filter passes air but prevents passage of the dust in the container. A pressure detector detects an internal pressure of the container. The internal pressure of the container fluctuates due to a variation in an effective area of the filter for allowing the air to pass according to the dust collected and accumulated in the container. A dust accumulating quantity calculator which determines a quantity of the dust in the container based on the pressure detected.

Abstract: A vapor trap for detecting VOCs includes a housing, having a first end portion, a second end portion and at least one opening for receiving gas vapor. The housing is at least partially buried in ground with a vapor containment mechanism detachably connected to the first end portion of the housing. The vapor containment mechanism can be removed and replaced with a vapor sampling mechanism. An organic vapor analyzer can be connected in fluid relationship to the vapor sampling mechanism to measure VOCs. Optionally, a vacuum pump can be utilized to draw vapor into the vapor trap and then subsequently into the organic vapor analyzer. There can be a first selector valve located between the vapor sampling mechanism and the vacuum pump and a second selector valve located between the vapor sampling mechanism and the organic vapor analyzer. A preferred organic vapor analyzer is a photo-ionization detector.

Abstract: An end of service life indicator (ESLI) device for a fluid filter is included on the filter and visually indicates when the life of the filter has expired. The ESLI indicates the depletion of the filter by changing the color density on a surface of the device to a color density having a well distinguishable contrasting pattern that is easily recognizable even by individuals who are color-blind. The contrasting pattern may express text indicative of the state of the filter.

Abstract: A particulate filter system is provided including an exhaust system transporting emissions from an engine. A filter such as a diesel particulate filter is disposed in the exhaust system. An acoustic sensor is associated with the exhaust system for detecting one or more frequencies passing through the filter. The frequency corresponds to a filter state indicative of a clean, full, loading, or failed filter. One or more acoustic sensors may fluidly or mechanically coupled to portions of the exhaust system to determine the frequency caused by the exhaust flow through the filter. The acoustic emissions from the filter may be used to compare to a known filter state to determine the present filter state. Alternatively, more sophisticated mathematical approaches may be used in which processed filter information is compared to a known filter state to determine the present filter state.

Abstract: An air decontamination system that cleans air which has been contaminated by a terrorist attack or other means of contamination. The air is drawn into the system, cleaned through the use of filters, and exits the system into an enclosed area where people have gathered to await passage of the danger. The unit is easily turned on and off via a switch.

Abstract: An air or oil dryer module is provided to remove or reduce moisture from a lubricant using a pressurized air supply to inject dry air into a lubricant sump. As the “dry air” or air with a minimized moisture content, gathers moisture from the lubricant a relative humidity sensor detects an increase in air moisture. At a pre-determined relative humidity level, a fresh supply of air is added into the lubricant sump, purging the higher relative humidity level air from the sump. A method of reducing moisture content of a lubricant contained in an enclosed space is also disclosed and is performed by agitating the lubricant, providing a humidity sensor in fluid communication with the enclosed space, measuring the humidity of the enclosed space and comparing the humidity measurement with a pre-selected humidity level, introducing dry air into the enclosed space if the humidity level equals or exceeds the pre-selected humidity level, until the saturated humidity level is less than the pre-selected humidity level.

Abstract: An air cleaning apparatus includes an air cleaning unit moved in a vertical direction to clean room air, allowing the room air to be effectively and uniformly cleaned in a short period of time. The air cleaning apparatus includes a longitudinal cabinet to stand on a support surface. An air cleaning unit is installed in the cabinet to move in the vertical direction, and is provided with a blowing unit and a filtering unit to clean air. An elevating unit is provided at at least one of the cabinet and the air cleaning unit to move the air cleaning unit in the vertical direction. The air cleaning apparatus also includes upper and lower sensors, and a control unit. The upper and lower sensors are provided on upper and lower portions of the cabinet, respectively, to sense air pollution levels of upper and lower parts of a room. The control unit controls the air cleaning unit so that the air cleaning unit moves upward or downward, according to data obtained from the upper and lower sensors.

Abstract: An air cleaning apparatus includes an air cleaning unit at its upper and lower portions thereof which are independently operated to effectively and uniformly clean room air in a short period of time. The air cleaning apparatus includes a cabinet provided with first and second air cleaning units. The first and second air cleaning units are connected to each other, and are provided with a blowing unit and a filtering unit. First and second sensors are provided on the cabinet in such a way as to be spaced apart from each other, and to sense air pollution levels at opposite sides of a room. The air cleaning apparatus also includes a control unit. The control unit controls the first and second air cleaning units so that both the first and second air cleaning units are operated or either of the first and second air cleaning units is operated, according to data obtained from first and second sensors.

Abstract: An air purifier includes a main body defining an air passage therein to allow sucked air to pass therethrough prior to being discharged, and a first filter installed in the main body to be switched between a closed state and an open state. The first filter removes contaminants from the sucked air in the closed state, and allows the sucked air to pass through the air passage in the open state. The air purifier may include a main body to suck and discharge air, with a bypass passage formed in the main body so that the bypass passage is opened or closed by a door, and a first filter installed in the main body. The sucked air passes through the first filter prior to being discharged when the door is closed, and passes through the bypass passage prior to being discharged when the door is opened.

Abstract: A schedule indicator (14) is provided having a wall with a first selection arrow (13) and a base (16). The base has an annular bottom wall (18) with an annular array of upwardly projecting protrusions (20). The schedule indicator also includes a first condition indicating ring (24) and a second condition indicating knob (25) positioned concentrically within the indicating ring. The indicating ring has a peripheral top surface (27) having an annular array of timing indicia (28), a recessed top surface (29) having an annular array of top depressions (31), and a bottom surface (32) with an annular array of bottom depressions (33). The indicating knob has a grasping portion (37) with a second selection arrow (38) thereon, and at least one protrusion (39) sized and shaped to be releasably received within the indicating ring top depressions (31).

Abstract: Method and apparatus for filtering contaminants from a pressurized fluid. First and second filter elements are arranged within a housing to receive a flow of pressurized fluid. Respective first and second portions of the flow are directed through the filter elements and impinge opposing sides of a piston member which is biased in a first position by a collapsible pressure responsive member, such as a buckling pin. So long as the differential pressure across the first filter element is below a selected threshold, the first portion of the flow passes through an outlet of the housing and the second portion of the flow is blocked. Once sufficient contaminants have been captured by the first filter element, however, the resulting increase in differential pressure causes a collapse of the pressure responsive member. This moves the piston to a second position and directs the second portion of the flow to the outlet.

Abstract: A liquid separator for separating liquid from gases, comprises a water trap (1) that includes a container (3), a connector (5) for incoming gas flow, a separation chamber (4) that includes a filter and at least one connection passageway for leading separated gas to an analysis instrument. The water trap (1) can be removably fitted in a holder unit (2) connected to the analysis instrument, and the holder unit (2) includes connection devices (15, 16) for receiving the connection passageway.

Abstract: A fuel cell system having a gas-liquid separator that comprises (a) a housing defining an inlet, an outlet, and a longitudinal flow through passage extending between the inlet and the outlet; (b) a plurality of baffles arranged in longitudinally spaced serial relation in and along the passage and each blocking a portion of the cross section of the passage; and (c) means mounting the baffles for relative movement to selectively vary the composite cross-sectional blockage defined by the baffles relative to a sensed parameter of the fuel cell system.

Abstract: A residual gas removing device for a gas supply apparatus in a semiconductor fabricating facility, includes a low stress valve disposed between a mass flow controller and a chamber. The low stress valve alternately supplies or cuts off a gas from the mass flow controller to the chamber. A WF6 gas removing apparatus is in flow communication with a gas inlet line of the low stress valve to remove a residual WF6 gas in the gas inlet line, before proceeding with a subsequent deposition step.

Abstract: The present invention is directed to a filter module that may incorporate sensors to measure various characteristics of fluid flow and filtration. The sensors may be MEMS and may measure the temperature, flow rate, pressure, etc. of the fluid. One or more MEMS sensors may be included in a sensor package which, in turn, may be included in a sensor component. The latter, which may also include a processor, conductor pins, etc. for data communication, may be coupled to a sensor port in such a way as to allow contact between the sensor(s) and the fluid. Sensor measurements may be used to determine the occurrence of harmful events, such as cavitation or particle breakthrough, or to predict the remaining service life of a filter element.

Abstract: A sensor component that may be used in conjunction with a filter module may include a plurality of sensor packages. The latter, in turn, may incorporate one or more micro-electromechanical systems (MEMS) sensors to measure various characteristics of fluid flow and filtration. A single sensor component may be adapted to measure the pressure, temperature, flow rate, differential pressure, conductivity, viscosity, pH level, etc. of the fluid at an upstream and a downstream location. Sensor measurements may be obtained continuously in order to monitor and indicate fluid conditions, including the use of a warning mechanism to indicate an out-of-range condition when the measurements fall outside of pre-set limits. Depending on the application and the fluid being filtered, data, including measurement data, may be transmitted through electrical connections or wirelessly. In wireless configurations, a sleep-mode may be included to maximize the life of local power supplies.

Abstract: A safety device for the air in a room has an intake air channel for supplying outside air to the room. A device for air treatment is provided. A detector for air contaminants is arranged in the intake air channel. A safety closure with a drive is arranged in the air intake channel and has an open position and a closed position for airtightly closing the intake air channel or an inlet of the device for air treatment that is arranged downstream of the safety closure. An exhaust air channel is connected to the room and the device for air treatment. When the safety closure is in the open position, a partial recirculating operation occurs. When the safety closure is in the closed position, a complete recirculating operation is present. The device for air treatment, the detector, and the drive are connected to a control device.

Abstract: The invention concerns a device and method for monitoring the integrity of filtering installations consisting of a filter housing (1) designed to perform integrity tests and for filtration, equipped with a plurality of filter elements (2, 3) and an electronic testing and monitoring unit (4) designed for monitoring and performing integrity tests, said filter elements (2, 3) having each a storage element and a communicating part (7) being connected to the monitoring and testing unit arranged in the filtering housing, whereon data of said electronic storage elements can be read.

Abstract: A filtering apparatus and replaceable filter assembly including an electronic filter identification system having an electronic label on the filter and a read-out mechanism on the filtering apparatus. The read-out mechanism is connected to a control unit of the filtering apparatus and the control unit is influenced by the read-out mechanism. The control unit may be actuable only upon disposing a filter in the filtering apparatus having a proper or predetermined electronic label. The filter identification system may also be interactive. The electronic label on the filter includes a read/write memory which can store the number of operating hours of the filter.