Field Effect Transistors (fets) With Nanowire- Or Nanotube-channel Region Patents (Class 977/938)
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Patent number: 8575663Abstract: The present invention generally relates, in some aspects, to nanoscale wire devices and methods for use in determining analytes suspected to be present in a sample. Certain embodiments of the invention provide a nanoscale wire that has improved sensitivity, as the carrier concentration in the wire is controlled by an external gate voltage, such that the nanoscale wire has a Debye screening length that is greater than the average cross-sectional dimension of the nanoscale wire when the nanoscale wire is exposed to a solution suspected of containing an analyte. This Debye screening length (lambda) associated with the carrier concentration (p) inside nanoscale wire is adjusted, in some cases, by adjusting the gate voltage applied to an FET structure, such that the carriers in the nanoscale wire are depleted.Type: GrantFiled: November 19, 2007Date of Patent: November 5, 2013Assignee: President and Fellows of Harvard CollegeInventors: Charles M. Lieber, Xuan Gao, Gengfeng Zheng
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Publication number: 20130270508Abstract: According to embodiments of the present invention, a non-volatile memory device is provided. The non-volatile memory device includes a nanowire transistor including a nanowire channel, and a resistive memory cell arranged adjacent to the nanowire transistor and in alignment with a longitudinal axis of the nanowire channel. According to further embodiments of the present invention, a method of forming a non-volatile memory device is also provided.Type: ApplicationFiled: April 11, 2013Publication date: October 17, 2013Applicant: Agency for Science, Technology and ResearchInventors: Xiang LI, Navab Singh, Zhixian Chen, Xinpeng Wang, Guo-Qiang Patrick Lo
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GRAPHENE TRANSISTOR GATED BY CHARGES THROUGH A NANOPORE FOR BIO-MOLECULAR SENSING AND DNA SEQUENCING
Publication number: 20130270521Abstract: A technique for a nanodevice is provided. A reservoir is separated into two parts by a membrane. A nanopore is formed through the membrane, and the nanopore connects the two parts of the reservoir. The nanopore and the two parts of the reservoir are filled with ionic buffer. The membrane includes a graphene layer and insulating layers. The graphene layer is wired to first and second metal pads to form a graphene transistor in which transistor current flowing through the graphene transistor is modulated by charges passing through the nanopore.Type: ApplicationFiled: April 17, 2012Publication date: October 17, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Hongbo Peng, Gustavo A. Stolovitzky, Wenjuan Zhu -
Patent number: 8557622Abstract: Exemplary embodiments provide semiconductor nanowires and nanowire devices/applications and methods for their formation. In embodiments, in-plane nanowires can be epitaxially grown on a patterned substrate, which are more favorable than vertical ones for device processing and three-dimensional (3D) integrated circuits. In embodiments, the in-plane nanowire can be formed by selective epitaxy utilizing lateral overgrowth and faceting of an epilayer initially grown in a one-dimensional (1D) nanoscale opening. In embodiments, optical, electrical, and thermal connections can be established and controlled between the nanowire, the substrate, and additional electrical or optical components for better device and system performance.Type: GrantFiled: September 1, 2011Date of Patent: October 15, 2013Assignee: STC.UNMInventors: Seung Chang Lee, Steven R. J. Brueck
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Patent number: 8551767Abstract: A sensor for detection of target nucleic acid comprising (a) a semiconductor nanostructure; and (b) a nucleic acid detection probe immobilized on the semiconductor nanostructure capable of hybridizing with the target nucleic acid, the detection probe comprising a polymer with a substantially non-ionic backbone.Type: GrantFiled: November 20, 2008Date of Patent: October 8, 2013Assignees: Agency of Science, Technology and Research, BCI (Biochip Innovations), SimemsInventors: Guojun Zhang, Huiyl Jay Chua, Ru Ern Chee, Narayanan Bala Subramanian, Ross Barnard, Uppili Raghavan
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Publication number: 20130256629Abstract: Graphene semiconductor device, a method of manufacturing a graphene semiconductor device, an organic light emitting display and a memory, include forming a multilayered member including a sacrificial substrate, a sacrificial layer, and a semiconductor layer deposited in sequence, forming a transfer substrate on the semiconductor layer, forming a first laminate including the transfer substrate and the semiconductor layer by removing the sacrificial layer to separate the sacrificial substrate from the semiconductor layer, forming a second laminate by forming a graphene layer on a base substrate, combining the first laminate and the second laminate such that the semiconductor layer contacts the graphene layer, and removing the transfer substrate.Type: ApplicationFiled: June 14, 2012Publication date: October 3, 2013Applicant: Samsung Electronics Co., Ltd.Inventors: Chang Seung LEE, Young Bae KIM, Young Jun YUN, Yong Sung KIM, David SEO, Joo Ho LEE
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Publication number: 20130244386Abstract: A device and method for device fabrication includes forming a buried gate electrode in a dielectric substrate and patterning a stack that includes a high dielectric constant layer, a carbon-based semi-conductive layer and a protection layer over the buried gate electrode. An isolation dielectric layer formed over the stack is opened to define recesses in regions adjacent to the stack. The recesses are etched to form cavities and remove a portion of the high dielectric constant layer to expose the carbon-based semi-conductive layer on opposite sides of the buried gate electrode. A conductive material is deposited in the cavities to form self-aligned source and drain regions.Type: ApplicationFiled: April 15, 2013Publication date: September 19, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: DECHAO GUO, SHU-JEN HAN, KEITH KWONG HON WONG, JUN YUAN
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Publication number: 20130240378Abstract: A nanopore device comprising a channel unit comprising a micro channel defined by a bottom surface and an insulator lateral wall; and a cover unit covering the micro channel, wherein the cover unit comprises a nanopore extending through the cover unit and connected to the micro channel; a first source/drain electrode disposed on an upper surface of the cover unit and adjacent to an inlet of the nanopore; an opening extending through the cover unit and connected to the micro channel; and a second source/drain electrode disposed on the upper surface of the cover unit and adjacent to the opening; as well as a method for fabricating and using the device.Type: ApplicationFiled: September 13, 2012Publication date: September 19, 2013Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jong-ho LEE, Jun-mo PARK
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Publication number: 20130240983Abstract: A process for fabricating a field-effect transistor device (20) implemented on a network of vertical nanowires (24), includes: producing a source electrode (26) and a drain electrode (30) at each end of each nanowire (24) symmetrically relative to the gate electrode of each elementary transistor implemented on a nanowire; creating a gate electrode by depositing a layer (38) of conductive material around a layer (36) of dielectric material that surrounds a portion of each nanowire (24), a single conductive layer (38) being used for all of the nanowires and the thickness of the conductive layer corresponding to the gate length of the transistor device; and insulating each electrode with a planar layer (32, 34) of a dielectric material in order to form a nanoscale gate and in order to insulate the contacts of each elementary transistor between the gate and the source and the gate and the drain.Type: ApplicationFiled: November 24, 2011Publication date: September 19, 2013Applicant: Centre National de la Recherche Scientifique (C.N.R.S.)Inventor: Guilhem Larrieu
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Patent number: 8530886Abstract: A semiconductor structure which includes a substrate; a graphene layer on the substrate; a source electrode and a drain electrode on the graphene layer, the source electrode and drain electrode being spaced apart by a predetermined dimension; a nitride layer on the graphene layer between the source electrode and drain electrode; and a gate electrode on the nitride layer, wherein the nitride layer is a gate dielectric for the gate electrode.Type: GrantFiled: March 18, 2011Date of Patent: September 10, 2013Assignee: International Business Machines CorporationInventors: Phaedon Avouris, Deborah A. Neumayer, Wenjuan Zhu
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Publication number: 20130221319Abstract: Non-planar semiconductor devices are provided that include at least one semiconductor nanowire suspended above a semiconductor oxide layer that is present on a first portion of a bulk semiconductor substrate. An end segment of the at least one semiconductor nanowire is attached to a first semiconductor pad region and another end segment of the at least one semiconductor nanowire is attached to a second semiconductor pad region. The first and second pad regions are located above and are in direct contact with a second portion of the bulk semiconductor substrate which is vertically offsets from the first portion. The structure further includes a gate surrounding a central portion of the at least one semiconductor nanowire, a source region located on a first side of the gate, and a drain region located on a second side of the gate which is opposite the first side of the gate.Type: ApplicationFiled: February 27, 2012Publication date: August 29, 2013Applicant: International Business Machines CorporationInventors: Jeffrey W. Sleight, Josephine B. Chang, Isaac Lauer, Shreesh Narasimha
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Patent number: 8520430Abstract: A memory device includes a first nanowire connected to a first bit line node and a ground node, a first field effect transistor (FET) having a gate disposed on the first nanowire, a second FET having a gate disposed on the first nanowire, a second nanowire connected to a voltage source node and a first input node, a third FET having a gate disposed on the second nanowire, a third nanowire connected to the voltage source node and a second input node, a fourth FET having a gate disposed on the third nanowire, a fourth nanowire connected to a second bit line node and the ground node, a fifth FET having a gate disposed on the fourth nanowire, and a sixth FET having a gate disposed on the fourth nanowire.Type: GrantFiled: July 20, 2012Date of Patent: August 27, 2013Assignee: International Business Machines CorporationInventors: Sarunya Bangsaruntip, Guy Cohen, Amlan Majumdar, Jeffrey W. Sleight
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Patent number: 8513099Abstract: A method of forming a self-aligned device is provided and includes depositing carbon nanotubes (CNTs) onto a crystalline dielectric substrate, isolating a portion of the crystalline dielectric substrate encompassing a location of the CNTs, forming gate dielectric and gate electrode gate stacks on the CNTs while maintaining a structural integrity thereof and forming epitaxial source and drain regions in contact with portions of the CNTs on the crystalline dielectric substrate that are exposed from the gate dielectric and gate electrode gate stacks.Type: GrantFiled: June 17, 2010Date of Patent: August 20, 2013Assignee: International Business Machines CorporationInventors: Josephine B. Chang, Paul Chang, Vijay Narayanan, Jeffrey W. Sleight
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Patent number: 8513741Abstract: In accordance with some embodiments, logical circuits comprising carbon nanotube field effect transistors are disclosed herein.Type: GrantFiled: August 23, 2011Date of Patent: August 20, 2013Assignee: Intel CorporationInventors: Ali Keshavarzi, Juanita Kurtin, Vivek De
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Publication number: 20130207079Abstract: Non-planar semiconductor devices including at least one semiconductor nanowire having a tapered profile which widens from the source side of the device towards the drain side of the device are provided which have reduced gate to drain coupling and therefore reduced gate induced drain tunneling currents.Type: ApplicationFiled: February 9, 2012Publication date: August 15, 2013Applicant: International Business Machines CorporationInventors: Jeffrey W. Sleight, Sarunya Bangsaruntip
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Publication number: 20130193410Abstract: Semiconductor nano-devices, such as nano-probe and nano-knife devices, which are constructed using graphene films that are suspended between open cavities of a semiconductor structure. The suspended graphene films serve as electro-mechanical membranes that can be made very thin, from one or few atoms in thickness, to greatly improve the sensitivity and reliability of semiconductor nano-probe and nano-knife devices.Type: ApplicationFiled: January 27, 2012Publication date: August 1, 2013Applicant: International Business Machines CorporationInventor: Wenjuan Zhu
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Patent number: 8487297Abstract: Disclosed is a carbon nanotube field effect transistor which stably exhibits excellent electrical conduction properties. Also disclosed are a method for manufacturing the carbon nanotube field effect transistor, and a biosensor comprising the carbon nanotube field effect transistor. First of all, an silicon oxide film is formed on a contact region of a silicon substrate by an LOCOS method. Next, an insulating film, which is thinner than the silicon oxide film on the contact region, is formed on a channel region of the silicon substrate. Then, after arranging a carbon nanotube, which forms a channel, on the silicon substrate, the carbon nanotube is covered with a protective film. Finally, a source electrode and a drain electrode are formed, and the source electrode and the drain electrode are electrically connected to the carbon nanotube, respectively.Type: GrantFiled: December 25, 2009Date of Patent: July 16, 2013Assignees: Mitsumi Electric Co., Ltd., Arkray, inc.Inventors: Agus Subagyo, Motonori Nakamura, Tomoaki Yamabayashi, Osamu Takahashi, Hiroaki Kikuchi, Katsunori Kondo
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Publication number: 20130175502Abstract: A method for forming a nanowire field effect transistor (FET) device includes forming a nanowire over a substrate, forming a liner material around a portion of the nanowire, forming a capping layer on the liner material, forming a first spacer adjacent to sidewalls of the capping layer and around portions of the nanowire, forming a hardmask layer on the capping layer and the first spacer, removing an exposed portion of the nanowire to form a first cavity partially defined by the gate material, epitaxially growing a semiconductor material on an exposed cross section of the nanowire in the first cavity, removing the hardmask layer and the capping layer, forming a second capping layer around the semiconductor material epitaxially grown in the first cavity to define a channel region, and forming a source region and a drain region contacting the channel region.Type: ApplicationFiled: January 5, 2012Publication date: July 11, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Sarunya Bangsaruntip, Guy Cohen, Amlan Majumdar, Jeffrey W. Sleight
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Publication number: 20130175503Abstract: A method of fabricating a FET device is provided which includes the following steps. Nanowires/pads are formed in a SOI layer over a BOX layer, wherein the nanowires are suspended over the BOX. A HSQ layer is deposited that surrounds the nanowires. A portion(s) of the HSQ layer that surround the nanowires are cross-linked, wherein the cross-linking causes the portion(s) of the HSQ layer to shrink thereby inducing strain in the nanowires. One or more gates are formed that retain the strain induced in the nanowires. A FET device is also provided wherein each of the nanowires has a first region(s) that is deformed such that a lattice constant in the first region(s) is less than a relaxed lattice constant of the nanowires and a second region(s) that is deformed such that a lattice constant in the second region(s) is greater than the relaxed lattice constant of the nanowires.Type: ApplicationFiled: January 5, 2012Publication date: July 11, 2013Applicant: International Business Machines CorporationInventors: Guy Cohen, Michael A. Guillorn, Conal Eugene Murray
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Publication number: 20130178019Abstract: A method for forming a nanowire field effect transistor (FET) device includes forming a nanowire over a substrate, forming a liner material around a portion of the nanowire, forming a capping layer on the liner material, forming a first spacer adjacent to sidewalls of the capping layer and around portions of the nanowire, forming a hardmask layer on the capping layer and the first spacer, removing an exposed portion of the nanowire to form a first cavity partially defined by the gate material, epitaxially growing a semiconductor material on an exposed cross section of the nanowire in the first cavity, removing the hardmask layer and the capping layer, forming a second capping layer around the semiconductor material epitaxially grown in the first cavity to define a channel region, and forming a source region and a drain region contacting the channel region.Type: ApplicationFiled: September 7, 2012Publication date: July 11, 2013Applicant: International Business Machines CorporationInventors: Sarunya Bangsaruntip, Guy M. Cohen, Amlan Majumdar, Jeffrey W. Sleight
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Publication number: 20130153855Abstract: A process comprises combining a Ce (IV) salt with a carbon material comprising CNT or graphene wherein the Ce (IV) salt is selected from a Ce (IV) ammonium salt of a nitrogen oxide acid and is dissolved in a solvent comprising water. The process is conducted under conditions to substantially oxidize the carbon material to produce an oxidized material that is substantially non-conducting. After the oxidation, the Ce (IV) is substantially removed from the oxidized material. This produces a product made by the process. An article of manufacture comprises the product on a substrate. The oxidized material can be formed as a pattern on the substrate. In another embodiment the substrate comprises an electronic device with the oxidized material patterning non-conductive areas separate from conductive areas of the non-oxidized carbon material, where the conductive areas are operatively associated with the device.Type: ApplicationFiled: December 16, 2011Publication date: June 20, 2013Applicant: International Business Machines CorporationInventors: Ali Afzali-Ardakani, Bhupesh Chandra, George S. Tulevski
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Patent number: 8466451Abstract: A FET inverter is provided that includes a plurality of device layers oriented vertically in a stack, each device layer having a source region, a drain region and a plurality of nanowire channels, wherein the source and drain regions of one or more of the device layers are doped with an n-type dopant and the source and drain regions of one or more other of the device layers are doped with a p-type dopant; a gate common to each of the device layers surrounding the nanowire channels; a first contact to the source regions of the one or more device layers doped with an n-type dopant; a second contact to the source regions of the one or more device layers doped with a p-type dopant; and a third contact common to the drain regions of each of the device layers. Techniques for fabricating a FET inverter are also provided.Type: GrantFiled: December 11, 2011Date of Patent: June 18, 2013Assignee: International Business Machines CorporationInventors: Josephine Chang, Paul Chang, Michael A. Guillorn, Jeffrey Sleight
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Publication number: 20130143356Abstract: A composition and method for forming a field effect transistor with a stable n-doped nano-component. The method includes forming a gate dielectric on a gate, forming a channel comprising a nano-component on the gate dielectric, forming a source over a first region of the nano-component, forming a drain over a second region of the nano-component to form a field effect transistor, and exposing a portion of a nano-component of a field effect transistor to dihydrotetraazapentacene to produce a stable n-doped nano-component, wherein dihydrotetraazapentacene is represented by the formula: wherein in the dihydrotetraazapentacene chemical structure, each of R1, R2, R3, and R4 can be hydrogen, an alkyl group of C1 to C16 carbons, an alkoxy group, an alkylthio group, a trialkylsilane group, a hydroxymethyl group, a carboxylic acid group or a carboxylic ester group.Type: ApplicationFiled: December 1, 2011Publication date: June 6, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Ali Afzali-Ardakani, Bhupesh Chandra, George S. Tulevski
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Patent number: 8455311Abstract: A solid state Klystron structure is fabricated by forming a source contact and a drain contact to both ends of a conducting wire and by forming a bias gate and a signal gate on the conducting wire. The conducting wire may be at least one carbon nanotube or at least one semiconductor wire with long ballistic mean free paths. By applying a signal at a frequency that corresponds to an integer multiple of the transit time of the ballistic carriers between adjacent fingers of the signal gate, the carriers are bunched within the conducting wire, thus amplifying the current through the solid state Klystron at a frequency of the signal to the signal gate, thus achieving a power gain.Type: GrantFiled: September 4, 2012Date of Patent: June 4, 2013Assignee: International Business Machines CorporationInventor: Paul M. Solomon
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Publication number: 20130134394Abstract: Techniques, apparatus and systems are described for wafer-scale processing of aligned nanotube devices and integrated circuits. In one aspect, a method can include growing aligned nanotubes on at least one of a wafer-scale quartz substrate or a wafer-scale sapphire substrate. The method can include transferring the grown aligned nanotubes onto a target substrate. Also, the method can include fabricating at least one device based on the transferred nanotubes.Type: ApplicationFiled: January 14, 2013Publication date: May 30, 2013Applicant: University of Southern CaliforniaInventor: University of Southern California
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Patent number: 8450143Abstract: A method of fabricating a circuit includes chemically bonding a coating to a plurality of nanoparticles. The nanoparticles are dispersed in a medium comprising organic molecules. An organic semiconductor channel is formed that comprises the medium. A plurality of electrodes is formed over the substrate. The electrodes are located to function as two of a gate electrode, a drain electrode, and a source electrode of a field-effect transistor.Type: GrantFiled: March 14, 2012Date of Patent: May 28, 2013Assignee: Alcatel LucentInventors: Oleksandr Sydorenko, Subramanian Vaidyanathan
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Publication number: 20130126830Abstract: A fin structure including a vertical alternating stack of a first isoelectric point material layer having a first isoelectric point and a second isoelectric material layer having a second isoelectric point less than the first isoelectric point is formed. The first and second isoelectric point material layers become oppositely charged in a solution with a pH between the first and second isoelectric points. Negative electrical charges are imparted onto carbon nanotubes by an anionic surfactant to the solution. The electrostatic attraction causes the carbon nanotubes to be selectively attached to the surfaces of the first isoelectric point material layer. Carbon nanotubes are attached to the first isoelectric point material layer in self-alignment along horizontal lengthwise directions of the fin structure. A transistor can be formed, which employs a plurality of vertically aligned horizontal carbon nanotubes as the channel.Type: ApplicationFiled: November 23, 2011Publication date: May 23, 2013Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Qing Cao, Dechao Guo, Shu-Jen Han, Yu Lu, Keith Kwong Hon Wong
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Patent number: 8445948Abstract: Methodologies and gate etching processes are presented to enable the fabrication of gate conductors of semiconductor devices, such as NFETs and/or PFETs, which are equipped with nano-channels. In one embodiment, a sacrificial spacer of equivalent thickness to the diameter of the gate nano-channel is employed and is deposited after patterning the gate conductor down to the gate dielectric. The residue gate material that is beneath the nano-channel is removed utilizing a medium to high density, bias-free, fluorine-containing or fluorine-and chlorine-containing isotropic etch process without compromising the integrity of the gate. In another embodiment, an encapsulation/passivation layer is utilized. In yet further embodiment, no sacrificial spacer or encapsulation/passivation layer is used and gate etching is performed in an oxygen and nitrogen-free ambient.Type: GrantFiled: September 20, 2010Date of Patent: May 21, 2013Assignee: International Business Machines CorporationInventors: Nicholas C. M. Fuller, Sarunya Bangsaruntip, Guy Cohen, Sebastian U. Engelmann, Lidija Sekaric, Qingyun Yang, Ying Zhang
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Patent number: 8445348Abstract: The present invention discloses a manufacturing method of a semiconductor component with a nanowire channel. The method comprises the following steps. The step of forming a stack structure on a substrate is performed. A semiconductor layer is formed on the substrate and the stack structure and further filled into the fillister. The semiconductor layer is patterned to form a source area and a drain area, and the channel region is located between the source area and the drain area. The semiconductor layer located outside the source area, the drain area and the fillister will be removed. And then, the stack structure is then removed. Therefore, the semiconductor layer filled inside the fillister will be exposed to be as a channel. A gate oxide layer is formed to cover the channel, and a gate layer is then formed on the gate oxide layer.Type: GrantFiled: March 28, 2012Date of Patent: May 21, 2013Assignee: National Chiao Tung UniversityInventors: Po-Yi Kuo, Tien-Sheng Chao, Yi-Hsien Lu
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Patent number: 8445337Abstract: A method of modifying a wafer having semiconductor disposed on an insulator is provided and includes establishing first and second regions of the wafer with different initial semiconductor thicknesses, forming pairs of semiconductor pads connected via respective nanowire channels at each of the first and second regions and reshaping the nanowire channels into nanowires each having a respective differing thickness reflective of the different initial semiconductor thicknesses at each of the first and second regions.Type: GrantFiled: May 12, 2010Date of Patent: May 21, 2013Assignee: International Business Machines CorporationInventors: Sarunya Bangsaruntip, Guy M. Cohen, Amlan Majumdar, Jeffrey W. Sleight
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Publication number: 20130119348Abstract: RF transistors are fabricated at complete wafer scale using a nanotube deposition technique capable of forming high-density, uniform semiconducting nanotube thin films at complete wafer scale, and electrical characterization reveals that such devices exhibit gigahertz operation, linearity, and large transconductance and current drive.Type: ApplicationFiled: June 8, 2012Publication date: May 16, 2013Inventors: Chongwu Zhou, Alexander Badmaev, Chuan Wang
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Publication number: 20130119349Abstract: A graphene transistor includes: a gate electrode on a substrate; a gate insulating layer on the gate electrode; a graphene channel on the gate insulating layer; a source electrode and a drain electrode on the graphene channel, the source and drain electrode being separate from each other; and a cover that covers upper surfaces of the source electrode and the drain electrode and forms an air gap above the graphene channel between the source electrode and the drain electrode.Type: ApplicationFiled: November 2, 2012Publication date: May 16, 2013Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hyun-jong CHUNG, U-in CHUNG, Ki-nam KIM
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Publication number: 20130105763Abstract: A semiconductor device, which comprises: a semiconductor substrate; a channel region on the semiconductor substrate, said channel region including a quantum well structure; a source region and a drain region on the sides of the channel region; a gate structure on the channel region; wherein the materials for the channel region, the source region and the drain region have different energy bands, and a tunneling barrier structure exists between the source region and the channel region.Type: ApplicationFiled: November 25, 2011Publication date: May 2, 2013Inventors: Huaxiang Yin, Jun Luo, Chao Zhao, Honggang Liu, Dapeng Chen
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Publication number: 20130099204Abstract: Carbon nanotubes can be aligned with compatibility with semiconductor manufacturing processes, with scalability for forming smaller devices, and without performance degradation related to structural damages. A planar structure including a buried gate electrode and two embedded electrodes are formed. After forming a gate dielectric, carbon nanotubes are assembled in a solution on a surface of the gate dielectric along the direction of an alternating current (AC) electrical field generated by applying a voltage between the two embedded electrodes. A source contact electrode and a drain contact electrode are formed by depositing a conductive material on both ends of the carbon nanotubes. Each of the source and drain contact electrodes can be electrically shorted to an underlying embedded electrode to reduce parasitic capacitance.Type: ApplicationFiled: October 21, 2011Publication date: April 25, 2013Applicants: KARLSRUHER INSTITUT FUER TECHNOLOGIE, INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Phaedon Avouris, Yu-Ming Lin, Mathias B. Steiner, Michael Engel, Ralph Krupke
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Publication number: 20130092992Abstract: A memory cell, an array of memory cells, and a method for fabricating a memory cell with multigate transistors such as fully depleted finFET or nano-wire transistors in embedded DRAM. The memory cell includes a trench capacitor, a non-planar transistor, and a self-aligned silicide interconnect electrically coupling the trench capacitor to the non-planar transistor.Type: ApplicationFiled: October 17, 2011Publication date: April 18, 2013Applicant: International Business Machines CorporationInventors: Josephine B. Chang, Leland Chang, Michael A. Guillorn, Wilfried E. Haensch
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Semiconductor device using carbon nanotubes for a channel layer and method of manufacturing the same
Patent number: 8421129Abstract: A CNT channel layer of a transistor is cut along a direction perpendicular to the channel to form a plurality of CNT patches, which are used to connect between a source and a drain. The arrangement of the CNT channel layer formed of a plurality of CNT patches can increase the probability that part of CNT patches becomes a semiconductive CNT patch. Since part of a plurality of CNT patches forming the channel layer is formed of a semiconductive CNT patch, a transistor having a good on/off ratio can be provided.Type: GrantFiled: April 9, 2008Date of Patent: April 16, 2013Assignee: NEC CorporationInventor: Masahiko Ishida -
Patent number: 8420455Abstract: A method of modifying a wafer having a semiconductor disposed on an insulator is provided and includes forming pairs of semiconductor pads connected via respective nanowire channels at each of first and second regions with different initial semiconductor thicknesses and reshaping the nanowire channels into nanowires to each have a respective differing thickness reflective of the different initial semiconductor thicknesses.Type: GrantFiled: May 12, 2010Date of Patent: April 16, 2013Assignee: International Business Machines CorporationInventors: Sarunya Bangsaruntip, Guy Cohen, Jeffrey W. Sleight
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Publication number: 20130089956Abstract: A method to fabricate a carbon nanotube (CNT)-based transistor includes providing a substrate having a CNT disposed over a surface; forming a protective electrically insulating layer over the CNT and forming a first multi-layer resist stack (MLRS) over the protective electrically insulating layer. The first MLRS includes a bottom layer, an intermediate layer and a top layer of resist. The method further includes patterning and selectively removing a portion of the first MLRS to define an opening for a gate stack while leaving the bottom layer; selectively removing a portion of the protective electrically insulating layer within the opening to expose a first portion of the CNT; forming the gate stack within the opening and upon the exposed first portion of the carbon nanotube, followed by formation of source and drain contacts also in accordance with the inventive method so as to expose second and third portions of the CNT.Type: ApplicationFiled: September 14, 2012Publication date: April 11, 2013Applicant: International Business Machines CorporationInventors: Josephine B. Chang, Martin Glodde, Michael A. Guillorn
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Patent number: 8405168Abstract: The present invention discloses a nanowire fabrication method and a semiconductor element using a nanowire fabricated thereby. The method of the present invention comprises steps: providing a substrate; sequentially depositing a silicon dioxide layer and a silicon nitride layer on the substrate; forming a patterned photoresist layer on the silicon nitride layer; using the patterned photoresist layer as a mask to etch the silicon nitride layer and the silicon dioxide layer with the substrate partly etched away to form a protrusion; removing the patterned photoresist layer to form an isolation layer; removing the silicon nitride and the silicon dioxide layer, sequentially depositing a dielectric layer and a polysilicon layer; and anisotropically etching the polysilicon layer to form nanowires on a region of the dielectric layer, which is around sidewalls of the protrusion.Type: GrantFiled: January 31, 2011Date of Patent: March 26, 2013Assignee: National Applied Research LaboratoriesInventors: Chia-Yi Lin, Min-Cheng Chen, Hou-Yu Chen
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Patent number: 8405132Abstract: A transistor structure includes a semiconductor substrate with a first surface, a diffusion region at the first surface of the substrate, a sacrificial gate formed on the diffusion region, and insulating side walls formed adjacent to the sacrificial gate. A metal gate is formed by etching out the sacrificial gate and filling in the space between the insulating side walls with gate metals. Silicided source and drain contacts are formed over the diffusion region between the side walls of two adjacent aluminum gates. One or more oxide layers are formed over the substrate. Vias are formed in the oxide layers by plasma etching to expose the silicided source and drain contacts, which simultaneously oxidizes the aluminum gate metal. A first metal is selectively formed over the silicided contact by electroless deposition, but does not deposit on the oxidized aluminum gate.Type: GrantFiled: October 22, 2010Date of Patent: March 26, 2013Assignee: Intel CorporationInventor: Peter Chang
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Publication number: 20130069041Abstract: A MOSFET with a graphene nano-ribbon, and a method for manufacturing the same are provided. The MOSFET comprises an insulating substrate; and an oxide protection layer on the insulating substrate. At least one graphene nano-ribbon is embedded in the oxide protection layer and has a surface which is exposed at a side surface of the oxide protection layer. A channel region is provided in each of the at least one graphene nano-ribbon. A source region and a drain regions are provided in each of the at least one graphene nano-ribbon. The channel region is located between the source region and the drain region. A gate dielectric is positioned on the at least one graphene nano-ribbon. A gate conductor on the gate dielectric. A source and drain contacts contact the source region and the drain region respectively on the side surface of the oxide protection layer.Type: ApplicationFiled: November 18, 2011Publication date: March 21, 2013Inventors: Huilong Zhu, Qingqing Liang, Zhijiong Luo, Haizhou Yin
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Patent number: 8394657Abstract: A biosensor using a nanodot and a method of manufacturing the same are provided. A silicon nanowire can be formed by a CMOS process to reduce manufacturing costs. In addition, an electrically charged nanodot is coupled to a target molecule to be detected, in order to readily change conductivity of the silicon nanowire, thereby making it possible to implement a biosensor capable of providing good sensitivity and being manufactured at a low cost.Type: GrantFiled: September 22, 2011Date of Patent: March 12, 2013Assignee: Electronics and Telecommunications Research InstituteInventors: Tae Youb Kim, Chil Seong Ah, Chang Geun Ahn, Han Young Yu, Jong Heon Yang, Moon Gyu Jang
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Patent number: 8394710Abstract: A method of forming a semiconductor device is provided, in which the dopant for the source and drain regions is introduced from a doped dielectric layer. In one example, a gate structure is formed on a semiconductor layer of an SOI substrate, in which the thickness of the semiconductor layer is less than 10 nm. A doped dielectric layer is formed over at least the portion of the semiconductor layer that is adjacent to the gate structure. The dopant from the doped dielectric layer is driven into the portion of the semiconductor layer that is adjacent to the gate structure. The dopant diffused into the semiconductor provides source and drain extension regions.Type: GrantFiled: June 21, 2010Date of Patent: March 12, 2013Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Bruce B. Doris, Balasubramanian S. Haran, Ali Khakifirooz, Ghavam G. Shahidi
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Patent number: 8395220Abstract: Nanowire-based devices are provided. In one aspect, a SRAM cell includes at least one pair of pass gates and at least one pair of inverters formed adjacent to one another on a wafer. Each pass gate includes one or more device layers each having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region and a gate common to each of the pass gate device layers surrounding the nanowire channels. Each inverter includes a plurality of device layers each having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region and a gate common to each of the inverter device layers surrounding the nanowire channels.Type: GrantFiled: March 12, 2012Date of Patent: March 12, 2013Assignee: International Business Machines CorporationInventors: Josephine Chang, Paul Chang, Michael A. Guillorn, Jeffrey Sleight
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Patent number: 8390705Abstract: A photodiode includes a first electrode, a second electrode, and a nanowire comprising a semiconductor core and a semiconductor shell. The nanowire has a first end and a second end, the first end being in electrical contact with the first electrode and the second end being in contact with the second electrode.Type: GrantFiled: October 27, 2009Date of Patent: March 5, 2013Assignee: Hewlett-Packard Develoment Company, L.P.Inventors: Alexandre M. Bratkovski, Vilatcheslav V. Osipov
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Patent number: 8384065Abstract: A method for forming a nanowire field effect transistor (FET) device, the method includes forming a suspended nanowire over a semiconductor substrate, forming a gate structure around a portion of the nanowire, forming a protective spacer adjacent to sidewalls of the gate and around portions of nanowire extending from the gate, removing exposed portions of the nanowire left unprotected by the spacer structure, and epitaxially growing a doped semiconductor material on exposed cross sections of the nanowire to form a source region and a drain region.Type: GrantFiled: December 4, 2009Date of Patent: February 26, 2013Assignee: International Business Machines CorporationInventors: Sarunya Bangsaruntip, Josephine B. Chang, Guy M. Cohen, Jeffrey W. Sleight
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Patent number: 8378333Abstract: An apparatus, system, and method are provided for a lateral two-terminal nanotube device configured to capture and generate energy, to store electrical energy, and to integrate these functions with power management circuitry. The lateral nanotube device can include a substrate, an anodic oxide material disposed on the substrate, and a column disposed in the anodic oxide material extending from one distal end of the anodic oxide material to another end of the anodic oxide material. The lateral nanotube device further can include a first material disposed within the column, and a second material disposed within the column. The first material fills a distal end of the column and gradiently decreases towards another distal end of the column along inner walls of the column. The second material fills the another distal end of the column and gradiently decreases towards the distal end of the column within the first material.Type: GrantFiled: September 26, 2008Date of Patent: February 19, 2013Assignee: University of MarylandInventors: Parag Banerjee, Sang Bok Lee, Israel Perez, Erin Robertson, Gary W. Rubloff
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Publication number: 20130040439Abstract: Various embodiments relate to a method of modifying the electrical properties of carbon nanotubes. The method may include providing a substrate having carbon nanotubes deposited on a surface of the substrate, and depositing on the carbon nanotubes a coating layer comprising a mixture of nanoparticles, a matrix in which the nanoparticles are dissolved or stabilized, and an ionic liquid. A field-effect transistor including the modified carbon nanotubes is also provided.Type: ApplicationFiled: February 7, 2011Publication date: February 14, 2013Applicant: NANYANG TECHNOLOGICAL UNIVERSITYInventors: Jianwen Zhao, Lain-Jong Li, Peng Chen, Bee Eng Mary Chan
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Publication number: 20130026449Abstract: A substrate includes a first source region and a first drain region each having a first semiconductor layer disposed on a second semiconductor layer and a surface parallel to {110} crystalline planes and opposing sidewall surfaces parallel to the {110} crystalline planes; nanowire channel members suspended by the first source region and the first drain region, where the nanowire channel members include the first semiconductor layer, and opposing sidewall surfaces parallel to {100} crystalline planes and opposing faces parallel to the {110} crystalline planes. The substrate further includes a second source and drain regions having the characteristics of the first source and drain regions, and a single channel member suspended by the second source region and the second drain region and having the same characteristics as the nanowire channel members. A width of the single channel member is at least several times a width of a single nanowire member.Type: ApplicationFiled: July 25, 2011Publication date: January 31, 2013Applicant: International Business Machines CorporationInventors: Sarunya BANGSARUNTIP, Josephine B. CHANG, Leland CHANG, Jeffrey W. SLEIGHT
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Patent number: RE44469Abstract: A multiple transistor differential amplifier is implemented on a single graphene nanoribbon. Differential amplifier field effect transistors are formed on the graphene nanoribbon from a first group of electrical conductors in contact with the graphene nanoribbon and a second group of electrical conductors insulated from, but exerting electric fields on, the graphene nanoribbon thereby forming the gates of the field effect transistors. A transistor in one portion of the differential amplifier and a transistor in another portion of the differential amplifier are responsive to an incoming electrical signal. A current source, also formed on the graphene nanoribbon, is connected with the differential amplifier, and the current source and the differential amplifier operating together generate an outgoing signal responsive to the incoming electrical signal.Type: GrantFiled: April 11, 2012Date of Patent: September 3, 2013Assignee: Pike Group LLCInventor: Lester F. Ludwig