Abstract: A capacitive displacement sensor for measuring thin targets is presented. The plate of the measurement probe is designed to take into account the thin target shape and to provide accurate measurements of the thin target by reducing lateral movement sensitivity of the plate. The probe may also include a guard to reduce capacitive coupling of the plate with other structures which would affect the accuracy of the measurement.
Inventors:
Anthony Stevenson, Mark Cresswell, John Curtis, David Alan Percival, David Andrewes, Anthony O'Dell, John Attridge, John Phillip Vessey, Felix Fernando