Abstract: A torque motor (20) has a base (21), four polepieces (22A, 22B, 22C, 22D) extending away from the base, the polepieces being separated from one another and being arranged at the corners of an imaginary polygon (27), each polepiece terminating in a pole (23A, 23B, 23C, 23D); a coil (24A, 24B, 24C, 24D) surrounding each of the polepieces; an armature (26) pivotally mounted on the base, the armature having a portion arranged to move toward and away from an associated one of the poles, respectively, to define a variable-reluctance air gap (gA, gB, gC, gD) therebetween; a permanent magnet (29) mounted on one of the base and armature and polarized in a direction parallel to the pivotal axis of the armature; and wherein at least a portion of the torque motor is formed by a MEMS technique; whereby the coil may be selectively energized to cause the armature to pivot about its axis.

Abstract: A torque motor (20) has a base (21), four polepieces (22A, 22B, 22C, 22D) extending away from the base, the polepieces being separated from one another and being arranged at the corners of an imaginary polygon (27), each polepiece terminating in a pole (23A, 23B, 23C, 23D); a coil (24A, 24B, 24C, 24D) surrounding each of the polepieces; an armature (26) pivotally mounted on the base, the armature having a portion arranged to move toward and away from an associated one of the poles, respectively, to define a variable-reluctance air gap (gA, gB, gC, gD) therebetween; a permanent magnet (29) mounted on one of the base and armature and polarized in a direction parallel to the pivotal axis of the armature; and wherein at least a portion of the torque motor is formed by a MEMS technique; whereby the coil may be selectively energized to cause the armature to pivot about its axis.

Abstract: A torque motor (20) has a base (21), four polepieces (22A, 22B, 22C, 22D) extending away from the base, the polepieces being separated from one another and being arranged at the corners of an imaginary polygon (27), each polepiece terminating in a pole (23A, 23B, 23C, 23D); a coil (24A, 24B, 24C, 24D) surrounding each of the polepieces; an armature (26) pivotally mounted on the base, the armature having a portion arranged to move toward and away from an associated one of the poles, respectively, to define a variable-reluctance air gap (gA, gB, gC, gD) therebetween; a permanent magnet (29) mounted on one of the base and armature and polarized in a direction parallel to the pivotal axis of the armature; and wherein at least a portion of the torque motor is formed by a MEMS technique; whereby the coil may be selectively energized to cause the armature to pivot about its axis.