Patents Represented by Attorney, Agent or Law Firm Aaron Waxlef
  • Device and method for the inspection of the condition of a sample
    Patent number: 6574305
    Abstract: A device and method having a stationary radiation source for directing polychromatic radiation such that the radiation is incident on a sample to be inspected in parallel or diverging rays, and a position-sensitive, energy-sensitive detector for measuring components of the radiation reflected by the sample thereby providing for the efficient and effective inspection of the sample.
    Type: Grant
    Filed: November 19, 2001
    Date of Patent: June 3, 2003
    Assignee: Koninklijke Philips Electronics, N.V.
    Inventors: Dirk Kornelis Gerhardus De Boer, Evert Jan Van Loenen