Abstract: A method of forming a contact hole includes forming a first conductive layer patterned so as to serve as an electrode or a wiring on a substrate, forming an insulation layer on the substrate and the first conductive layer, inserting a cutting instrument into the insulation layer at an angle to a surface of the insulation layer, the angle being in the range from 5° to 80°, and forming a tapered opening extending to the electrode or the wiring in the insulation layer by drawing out the cutting instrument.
Abstract: An electro-optical device includes an anti-reflective layer arranged on the face of a first metal layer that is closer to a semiconductor layer than a second metal layer. The anti-reflective layer covers the channel region as viewed in plan view.