Abstract: In a vertical type wafer supporting jig, a ring-like support plate is fixed to support pillars by a simple structure without conventional welding and without risk of the ring-like support plate falling off. The vertical type wafer supporting jig is configured for mounting many wafers onto many support plates stacked in a vertical direction and fixed to support pillars with a predetermined wafer mounting interval between the support plates. Support groove portions into which the support plates are inserted and supported are formed in the support pillars with a predetermined interval in the vertical direction between them. A fixing rod is provided adjoining at least one of the support pillars.

Abstract: In a known method for the cleaning of SiO2 grain, a fill of particles in a reactor having a vertically oriented center axis will be heated and simultaneously exposed to a treatment gas which is passed at a specified flow velocity from the bottom to the top through the reactor and the fill. To provide on this basis an improved cleaning method and a suitable simple device for it, it is proposed according to the invention and with regard to the cleaning method that a chloric treatment gas will be used which is set to a treatment temperature of at least 1,000° C. in the area of the fill, and that the flow velocity is set to at least 10 cm/s. With regard to the device according to the invention for the implementation of the method according to the invention, a gas shower is provided for the gas inlet, the gas shower comprising below the fill a multitude of nozzle openings distributed laterally to the center axis, for introduction of the treatment gas into the fill.

Abstract: In a known method of producing a quartz glass tube (22), a cylinder (21) of quartz glass which rotates about a rotational axis (27) is continuously fed to a heating zone (24), softened therein in portions starting from one end, and the softened portion (25) is drawn over a drill head (1) of a drill body arranged to be coaxial to the rotational axis and is thereby formed into the quartz glass tube (22). Starting therefrom, in order to indicate a method for forming a cylinder of quartz glass into a hollow cylinder of quartz glass having an inner bore that is as flawless as possible and straight and dimensionally stable, it is suggested according to the invention that a drill body should be used with a drill head (1) having a contact surface (2) of a convex curvature facing the cylinder (21), preferably a spherically shaped contact surface (2). The drill body according to the invention is characterized by a drill head (1) which has a contact surface (2) of a convex curvature (2).

Abstract: An object of the present invention is to provide a fluororesin-coated quartz glass jig free from peeling off of fluororesin coating on using hydrofluoric acid or from generating particles due to the etching of quartz glass, while yet preventing the generation of chipping by relaxing the impact imposed on the quartz glass by silicon wafers. It also is an object of the present invention to provide a production method of the fluororesin-coated quartz glass jig. The object above is achieved by a fluororesin-coated quartz glass jig the surface thereof is wholly covered with a pinhole-free fluororesin coating, and by a method for producing the same.

Abstract: An object of the present invention is to provide a synthetic quartz glass optical material having a high optical transmittance for a radiation 157 nm in wavelength emitted from F2 excimer laser and a high resistance against irradiation of a F2 excimer laser radiation, yet having a uniformity suitable for such a fine patterning using a F2 excimer laser, and to provide an optical member using the same. The problems above are solved by a synthetic quartz glass optical material for F2 excimer lasers having an OH group concentration of 0.5 ppm or lower, a fluorine concentration of 0.1 to 2 mol %, a hydrogen molecule concentration of 5×1016 molecules/cm3 or lower, a difference between the maximum and minimum fluorine concentrations within 20 mol ppm, and a difference between the maximum and minimum refraction indices of 2×10−5 or lower.

Abstract: It is an object of the present invention to provide a quartz glass jig excellent in the plasma etching resistant characteristics, which does not generate an abnormal etching and particles when used for a plasma generating apparatus. The above Object is obtained by a plasma resistant quartz glass jig that is used for an apparatus of generating plasma, wherein the surface roughness Ra of the quartz glass surface is in a range of from 5 &mgr;m to 0.05 &mgr;m, the number of microcracks of the surface is not more than 500 microcracks/cm2, and the hydrogen molecule concentration in the quartz glass is at least 5×1016 molecules/cm3.

Abstract: In a known method for producing an SiO2 blank, SiO2 particles are formed in a burner flame of a deposition burner and are deposited under the effect of an electrical field on a substrate. Starting therefrom, in order to indicate a simple and inexpensive method by means of which blanks can be produced with a predetermined, in particular axially homogeneous, mass and density distribution, it is suggested according to the invention that the geometrical shape of the burner flame (8) is adjusted by the effect of the electrical field (9) in dependence upon the geometrical parameter of a deposition surface (12; 21) of the substrate (1) that is assigned to the burner flame (8).

Abstract: Composite material with high resistance to temperature changes and a high density, and having an SiO2-containing matrix with quartz glass grains embedded therein is produced by preparing a suspension from a particle mixture of finely divided SiO2 powder having at least two different particle fractions and of the quartz glass grains, forming a green compact and sintering the compact. The matrix has an SiO2 content of at least 99% by wt. and is formed from at least first and second particle fractions, each of which is present as granules of nanoscale, amorphous, synthetically produced SiO2 primary particles having a mean primary particle size of less than 100 nm. The composite material has an SiO2-containing matrix with an SiO2 content of at least 99% by wt. It is particularly suited for applications such as starting material for producing a permanent mold for melting solar silicon.

Abstract: A vehicle simulation system has an image system for projecting a simulated out-the-window scene and symbology as produced by a head-up display onto a viewing screen. A dummy beamsplitting or combiner structure is positioned so that the user can view the scene with the head-up display symbology through it. A filtering structure is provided on the combiner structure to prevent the user from viewing the head-up display symbology outside the combiner structure.

Abstract: A system and method for interpreting a plurality of sets of program instructions of an avionic flight computer are implemented on a general-purpose commercially available computer having multi-processing capabilities with a greater number of processors than the avionics computer. The system and method include assigning each of the avionic computer processors to a corresponding one of the processors on the commercial computer and loading each set of program instructions into one of a plurality of cache memories each associated with one of the commercial computer processors. The system and method further include executing a shared process including the interpreter instructions on each of the commercial computer processors associated with one of the avionics computer's processors. Each shared process interprets only those program instructions intended for its associated processor.

Abstract: A dual mode light source unit is configured so that it can be secured into a conventional incandescent bulb socket on the aircraft. The light source has a connector portion that fits in the socket and receives the electrical current supplied thereto by the aircraft electrical system. The unit also comprises electric circuitry connected with the connector portion and a visible light source and an IR light source. The electric circuitry processes the input current from the socket and, based thereon, operates in either a civilian, visible mode or a covert IR mode. Where the current is in one electrical state, such as for example a certain voltage, the electric circuit sends power to the visible light source. When the current is in a different electrical state, e.g., a different voltage level, the circuitry sends power only to the IR source, and no visible light is emitted.

Abstract: The invention concerns a quartz glass body for an optical component for the transmission of UV radiation with a wavelength of 250 nm and less, especially for a wavelength of 157 nm, as well as a process for the manufacture of the quartz glass body where fine quartz glass particles are formed by flame hydrolysis of a silicon compound, deposited and vitrified. Suitability of a quartz glass as represented by high base transmission and radiation resistance depends on structural properties caused by local stoichiometric deviations, and on the chemical composition. The quartz glass body according to the inventions is distinguished by a uniform base transmission (relative change of base transmission ≦1%) in the wavelength range from 155 nm to 250 nm (radiation penetration depth of 10 mm) of at least 80%, a low OH content (less than 10 ppm by weight) and a glass structure substantially free from oxygen defect centers.

Abstract: A projector system has an image display with at least two image display portions each displaying a respective image. At least two projection assemblies are provided, each associated with a respective image display portion. These projection assemblies each receive a respective image from the respective image display portion and project this image onto the projection screen. The projection assemblies each include a system for independently and selectively locating the projected image on the screen. The projection assembly includes a stationary mirror supported adjacent the image display portion receiving the image therefrom and reflecting said image outwardly from the image display to the movable mirror. Preferably, the stationary mirror has an upper end portion and a lower edge portion. The lower edge portion is adjacent the image display portion and the mirror extends obliquely upwardly therefrom.

Abstract: To facilitate the start of a process using a quartz glass crucible with a crucible body and an inner layer of quartz glass a quartz glass crucible is provided with an inner surface roughened at least in the starting zone region by multiple depressions disposed at a maximum distance of 5 mm from one another. Furthermore, a simple and inexpensive process for the manufacture of such a quartz glass crucible is described, by providing a crucible body with a smooth inner surface of quartz glass and subsequently roughening the inner layer in the starting zone region by multiple depressions disposed at a maximum of 5 mm from one another.

Abstract: In a known method for the manufacture of a tube made of a vitreous material, especially of quartz glass, a hollow cylindrical semifinished product made of a vitreous material is carried essentially vertically to a heating zone, wherein it is heated and drawn off downwards—without the use of tools—to the tube by forming a transitional area from semifinished product to tube, while diameter and wall thickness of the tube are continuously measured, and the tube's measured geometrical data being used to generate a control signal with the aid of which a pressure difference is regulated between pressure P1 in the interior space of the semifinished product, the transitional area and the tube, as well as pressure P2 in the heating chamber which is regulated in the heating zone at least in the transitional area from semifinished product to tube and its adjacent tube area.

Abstract: A vehicle simulator having a projection system for projecting a generated scene and symbology onto a common viewing screen. Tracking apparatus is provided for providing position and/or angular orientation signals representative of the eye of a person viewing the projected scene and symbology. An image generation system is included for generating the scene and symbology for the projection system, such scene and symbology being generated as a function of the position and/or angular orientation signals provided by the tracking apparatus. Such symbology is representative of symbology produced by a head-up display. The image generation system generates the scene and symbology with characteristics which simulate vignetting and/or occulting effect characteristics of the head-up display.

Abstract: A method for the cleaning of SiO2 grain is known whereby SiO2 grain comprising contaminations is heated to a temperature at which the contaminations soften or form melting agglomerates with the SiO2 grain, thus separating the contaminations and the SiO2 grain. On this basis and to specify a method which achieves high grain purity at comparatively little expenditure of time, material and costs, and to provide a simple device suitable for the implementation of the method, it is proposed according to the invention that the SiO2 grain is fed to and heated in a gas stream which is directed towards an impingement plate, the SiO2 grain being accelerated in the direction of the impingement plate such that softened contaminations or melting agglomerates adhere to the impingement plate and cleaned SiO2 grain is removed from the impingement plate.

Abstract: The invention concerns a drilling device (1) for brittle materials with a drill head (2) detachably fixed to a drilling rod (3) by means of a positive-lock connection for transmission of the drilling torque. For its exact relative positioning, the drill head (2) has a conical shape (10) which in the represented operating state engages centrally into a corresponding recess (11) of the drilling rod (3). As a protection against any axial loosening, a fixing device or arrest (15; 20) designed as a hollow nut is provided engaging into a thread (16) of the drill head (2) and into a thread (17) of the drilling rod (3), the threads (16, 17) having countercurrent pitches. By rotating the arrest (15), the drill head (2) and the drilling rod (3) can thus be simply braced against each other or pulled away from each other, the connection enclosed by the arrest (15) having optimum protection from external influences at the same time.

Abstract: Based on a known process for the manufacture of opaque quartz glass, by mixing SiO2 particles and an additive which is volatile at a melting temperature, forming a body and melting said body with an advancing melt front forming in the body, it is proposed according to the invention that in order to reduce the danger of contamination, a body (1) be formed with an inner bore (6) and be heated in such a manner that the melt front (10) advances from the inner bore (6) to the outside. The article of pure opaque quartz glass according to the invention has high resistance to temperature change, high mechanical strength and good chemical durability. It is distinguished by an opening (6) enclosed by an inner wall (9), with an inner SiO2 surface layer (15) having a layer thickness ranging from 30 mm to 500 mm and a density of at least 2.15 g/cm3.

Abstract: In a known process for the production of opaque quartz glass a blank is formed from synthetic SiO2 granulate and is heated at a vitrification temperature to form a body of opaque quartz glass. In order to provide on this basis a process for the production of pure opaque quartz glass with a homogenous pore distribution, high density, high viscosity and a low tendency to devitrify, it is proposed according to the invention that the SiO2 granulate to be used is a SiO2 granulate (21; 31) composed of at least partially porous agglomerates of SiO2 primary particles, with a specific BET surface ranging from 1.5 m2/g to 40 m2/g and an apparent density of at least 0.8 g/cm3. A SiO2 granulate (21; 31) suitable for the implementation of the process is distinguished in that it is formed from at least partially porous agglomerates of SiO2 primary particles and in that it has a specific BET surface ranging from 1.5 m2/g to 40 m2/g and an apparent density of at least 0.6 g/cm3.