Abstract: A capacitor structure is provided, with a first conductor on top of a substrate, a first non-conductor on top of and substantially in register with the first conductor, the first conductor and first non-conductor having a first opening formed therein, a non-conductive sidewall spacer formed in the first opening, the non-conductive sidewall spacer having a second opening formed therein, and a second conductor formed in the second opening.
Type:
Grant
Filed:
December 22, 1995
Date of Patent:
June 22, 1999
Assignee:
International Business Machines Corporation
Inventors:
Katherine Lynn Saenger, James H. Comfort, Alfred Grill, David Edward Kotecki
Abstract: A single furnace loading cycle technique and a ventable sintering box therefor are disclosed for the sintering of products, such as, ceramic substrates. The sintering box includes a closeable cover which is held open by collapsible or deformable or sensitive spacers in a first furnace temperature range. The sensitive spacers collapse or deform in a higher temperature range to seal closed the box and the substrates therein. Additional spacers may be used for applying weight upon the substrates at the higher temperature range. Thus, volatile agents within the substrates are permitted to escape in the first temperature range but are prevented from escaping in the higher temperature range and in situ sintering weights can be applied without removing the substrates from the furnace.
Type:
Grant
Filed:
May 26, 1995
Date of Patent:
May 13, 1997
Assignee:
International Business Machines Corporation
Inventors:
Benjamin V. Fasano, Johnathan S. Fish, Gregory M. Johnson, Subhash L. Shinde