Patents Represented by Attorney, Agent or Law Firm Anthony L. Canale
  • Chemical-mechanical planarization of metallurgy
    Patent number: 6632377
    Abstract: Copper or a copper alloy is removed by chemical-mechanical planarization (CMP) in a slurry of an oxidizer, an oxidation inhibitor, and an additive that appreciably regulates copper complexing with the oxidation inhibitor.
    Type: Grant
    Filed: September 30, 1999
    Date of Patent: October 14, 2003
    Assignee: International Business Machines Corporation
    Inventors: Vlasta Brusic, Daniel C. Edelstein, Paul M. Feeney, William Guthrie, Mark Jaso, Frank B. Kaufman, Naftali Lustig, Peter Roper, Kenneth Rodbell, David B. Thompson