Abstract: A vapor deposition method for making preforms from which optical waveguide fibers are drawn wherein at least a first precursor compound is oxidized at one oxidation site and at least a second precursor compound, which is different from the first precursor compound, is oxidized at a second oxidation site. The method is particularly applicable in cases where the first and second precursor compounds are chemically incompatible with one another or where the flow rate of the second precursor compound is substantially lower than the flow rate of the first precursor compound.