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Patents Represented by Law Firm Barkhurst & Oliff

Electrically conductive Si.sub.3 N.sub.4 -C series amorphous material and a method of producing the same

Patent number: 4393097

Abstract: Electrically conductive Si.sub.3 N.sub.4 -C series amorphous material having excellent thermal and mechanical characteristics is produced in a massive size by chemical vapor deposition.

Type: Grant

Filed: July 18, 1980

Date of Patent: July 12, 1983

Inventors: Toshio Hirai, Takashi Goto