Patents Represented by Attorney, Agent or Law Firm Barton A. Smith
  • Patent number: 8224764
    Abstract: A method and an apparatus utilizing a digital computer programmed for the purpose to perform a virtual combination of potential source chemicals, found in a raid or a chemical cache, for the manufacture of Homemade Explosives (HMEs), so as to transform the raw inventory of found chemicals quickly and accurately into a readily understandable output predicting the various HME formulations whose manufacture was contemplated by a would-be bomb maker, along with an assessment of the relative likelihoods of each such possible HME outcome.
    Type: Grant
    Filed: June 1, 2009
    Date of Patent: July 17, 2012
    Inventor: Gregory Albert Ouzounian
  • Patent number: 6699356
    Abstract: A chemical-mechanical jet etching method rapidly removes large amounts of material in wafer thinning, or produces large-scale features on a silicon wafer, gallium arsenide substrate, or similar flat semiconductor workpiece, at etch rates in the range of 10-100 microns of workpiece thickness per minute. A nozzle or array of nozzles, optionally including a dual-orifice nozzle, delivers a high-pressure jet of machining etchant fluid to the surface of the workpiece. The machining etchant comprises a liquid or gas, carrying particulate material. The liquid may be a chemical etchant, or a solvent for a chemical etchant, if desired. The areas which are not to be etched may be shielded from the jet by a patterned mask, or the jet may be directed at areas from which material is to be removed, as in wafer thinning or direct writing, depending on the size of the desired feature or etched area.
    Type: Grant
    Filed: August 17, 2001
    Date of Patent: March 2, 2004
    Assignee: Applied Materials, Inc.
    Inventors: Robert Z. Bachrach, Jeffrey D. Chinn
  • Patent number: 6605319
    Abstract: The method of the invention involves depositing a plurality of thin layers of film, each layer having a thickness ranging from about 500Å to about 2000Å. Low Pressure Chemical Vapor Deposition or other techniques known in the art maybe used to deposit each thin layer of film. The film is polysilicon or silicon-germanium, where the germanium content ranges from about 4% by weight to about 20% by weight germanium. A Rapid Thermal Anneal (“RTA”) is performed on a deposited thin film layer to relieve residual film stress in at least that film layer. The use of RTA rather than furnace annealing permits much shorter annealing times. Optionally, but advantageously, hydrogen may be present during RTA to permit the use of lower processing temperatures, typically about 20% lower relative to a customary anneal. A series of film deposition/rapid thermal anneal cycles is used to produce the desired, nominal total thickness polysilicon film.
    Type: Grant
    Filed: February 11, 2002
    Date of Patent: August 12, 2003
    Assignee: Applied Materials, Inc.
    Inventors: Jeffrey D. Chinn, Yi-Hsing Chen, Robert Z. Bachrach, John Christopher Moran