Abstract: A package having a plurality of stacked substrates is provided. The package has at least two substrates. One substrate is stacked over the other to construct a three-dimensional circuit structure. Elements are disposed on the respective substrates. At least a conductive column is disposed between the two substrates. A lead-frame is connected to the substrates or the elements. The lead-frame also has a plurality of leads. The two neighboring substrates are electrically connected through the conductive column so that the average signal transmission length is shortened and the signal transmission quality is improved. Furthermore, the conductive column increases the mechanical strength of the package and reduces the degree of warping in the package so that a longer life span can be expected.

Abstract: In the course of forming the collar dielectric in a DRAM cell having a deep trench capacitor, a number of filling and stripping steps required in the prior art are eliminated by the use of a spin-on material that can withstand the high temperatures required in front-end processing and also provide satisfactory filling ability and etch resistance. The use of atomic layer deposition for the formation of the collar dielectric reduces the need for a high temperature anneal of the fill material and reduces the amount of outgassing or cracking.