Abstract: A semiconductor manufacturing automation method for analyzing a patterned feature formed on a semiconductor layer is disclosed. At least one patterned feature is scanned to generate an amplitude modulated waveform signal of the line and neighboring space characteristics. Signal processing is automatically performed on this waveform by an in-line computational source to extract known patterned features based on the profile of the amplitude modulated waveform signal. The extracted waveform segments are subjected to known geometric shapes to determine if the waveform indicates a normal or abnormal patterned feature on a semiconductor layer.

Abstract: An architecture for creating multiple operating voltage MOSFETs. Generally, an integrated circuit structure includes a semiconductor area with a major surface formed along a plane and first and second spaced-apart doped regions formed in the surface. A third doped region forming a channel of different conductivity type than the first region is positioned over the first region. A fourth doped region of a different conductivity and forming a channel is positioned over the second region. The process of creating the gate structure for each of the two transistors allows for the formation of oxide layers of different thickness between the two transistors. The transistors are therefore capable of operating at different operating voltages (including different threshold voltages). Each transistor further includes fifth and sixth layers positioned respectively over the third and fourth regions and having an opposite conductivity type with respect to the third and fourth regions.

Abstract: A thin-film multi-layer high Q transformer. To form an outer transformer winding a plurality of parallel first level metal runners are formed in a first insulating layer overlying the semiconductor substrate. A plurality of vertical conductive vias are formed in third and fourth insulating layers and in electrical communication with each end of the first level metal runners. A fourth insulating layer is disposed over the third insulating layer and additional vertical conductive vias and a fourth level metal runner are formed therein. Thus, the fourth level metal runners and the intervening vertical conductive vias connect each of the first level metal runners to form a continuously conductive structure having a generally helical shape. The inner winding of the transformer is similarly formed.

Abstract: A system and method for memory management in a high-speed network environment. Multiple packets are interleaved in data streams and sent to a Memory Manager System. Read and write requests are queued in FIFO buffers. Subsets of these requests are grouped and ordered to optimize processing. This method employs a special arbitration scheme between read and write accesses. Read and write requests are treated as atomic. Memory bank selection is optimized for the request being processed. Alternating between memory bank sets is done to minimize bank conflicts. Link list updates are pipelined. Multiple independent link lists may be supported with the inclusion of a link list identifier. Arbitration between read and write requests continues until the group is exhausted. Then, processing is repeated for the next requests in the BRAM (buffer memories).

Abstract: A bandage or other injury dressing dispenser is disclosed. The dispenser includes a plurality of differently-sized compartments, one for each injury dressing size. The dispenser includes bottom, front, rear and top surfaces and further includes a tension member in each compartment, for providing a biasing force between the compartment rear surface and a backing plate in each compartment. The injury dressings are disposed vertically between the backing plate and the front compartment surface, such that the tension member urges the injury dressings forwardly against the interior side of the front surface. The injury dressings are dispensed from a slot in the bottom surface of each compartment by the application of a downwardly directed force against the injury dressing through an arcuate opening in the front surface of each compartment.

Abstract: A method of nesting a computer model of a part (100) into a computer model of a fixture (104) useful for situations where the original positions of the part and fixture are completely separate and for situations where the respective part and fixture surfaces overlap. The model of the fixture is first inset by a distance D sufficient to eliminate any overlap between the modeled surfaces. The minimum normal distance segment (105) between the inset fixture surface and the part surface may then be determined using standard CAD system capabilities. A vector is then constructed having a length D beginning at the minimum distance point 111 on the inset fixture surface (107) and extending in the direction of the minimum normal distance segment (105) to a point (112) on the original fixture model surface (106). The minimum distance segment between point (112) and the surface of the part (102) is then determined to identify a point (114). The respective point pair (112,114) is recorded.

Abstract: A method (28) for manufacturing a precision part (18) utilizing a non-precision fixture (10). The non-precision fixture is precisely measured (40) and modeled in a CAD program (42) together with a model of the part (30). The part model is nested (48) into the fixture model, and a transformation matrix describing the movement of a coordinate system of the part during the step of nesting is recorded (50). The transformation matrix may then be used to transform (52) a tool path that had been developed for the originally designed shape of the fixture. Accordingly, imprecision in the location of a part within an imprecisely measured fixture may be accounted for during subsequent manufacturing operations.

Abstract: An improved polishing pad (22) for use in a chemical mechanical polishing (CMP) operation as part of a semiconductor device fabrication process. The polishing pad is formed of a plurality of particles of abrasive material (24) disposed in a matrix material (26). The abrasive particles may be a stiff inorganic material coated with a coupling agent, and the matrix material may be a polymeric material such as polyurethane. As the polishing pad wears through repeated polishing operations, the newly exposed polishing surface will contain fresh abrasive particles and will exhibit the same polishing properties as the original surface, thereby providing consistent polishing performance throughout the life of the pad without the need for conditioning operations. In one embodiment the distribution of particles of abrasive material per unit volume of matrix material may vary from one portion (23) of the pad to another (25).

Abstract: A method for sorting respective incident log data from a plurality of machines undergoing diagnostics is provided. The method allows for receiving incident log data comprising one or more incidents from the plurality of machines and for receiving operational parameter data from the plurality of machines. The method further allows for executing a set of incident-authentication rules indicative of whether a received incident actually corresponds to a faulty condition or not. An assigning step allows for assigning a predetermined incident severity rating to the respective incidents, and a processing step allows for processing the respective incidents based on their respective incident severity rating.

Abstract: Computerized method, processor and computer-readable medium are provided for stereoscopically and seamlessly imaging on a generally cylindrical screen. The method allows to configure imaging data for a plurality of selectable sub-screens encompassing the cylindrical screen. Each sub-screen includes a plurality of selectable strips axially extending relative to a corresponding sub-screen in the cylindrical screen. The method further allows to render two channels imaging data increments for each strip based on a parallax model with a reference line selectively rotatable to be in parallel alignment relative to each respective plane defined by each strip. The method allows to combine each imaging data increment corresponding to each strip in a respective sub-screen to generate stereoscopic imaging data for that respective sub-screen, and further combines each sub-screen imaging data to generate stereoscopic imaging data substantially encompassing the angular span of the cylindrical screen.

Abstract: In-line process control for 120 nm and 100 nm lithography using the installed scanning electron microscope (SEM) equipment base. A virtual three-dimensional representation of a photoresist feature is developed by applying a transform function to SEM intensity data representing the feature. The transform function correlates highly accurate height vector data, such as provided by a stylus nanoprofilometer or scatterometer, with the highly precise intensity data from the SEM. A multiple parameter characterization of at least one critical dimension of the virtual feature is compared to an acceptance pattern template, with the results being used to control a downstream etch process or an upstream lithography process. A multiple parameter characteristic of a three dimensional representation of the resulting post-etch final feature may be compared to device performance data to further refine the acceptance pattern template.

Abstract: An enhanced split cooling system and method for a turbocharged internal combustion engine including a liquid cooled turbocharger 19 and an engine liquid coolant jacket 18, the system comprising a coolant pump 12 for pumping coolant from a coolant storage tank 16 in heat exchange relationship with the engine jacket 18 and turbocharger 19; an oil cooler 32 having coolant input and output lines; a valve assembly 74, 83 including a multi-port rotary valve actuated by a single actuator; a first coolant output line connected for conveying coolant from the engine to the valve assembly 74, 83; a radiator 22 connected via a second coolant line for receiving coolant from the valve assembly 74, 83 and having a coolant outflow line to return coolant to the coolant tank 16; an intercooler 28 operatively associated with the turbocharger 19 for passing the coolant in hear exchange relationship with compressed air in the turbocharger 19; a lube oil subcooler 46 coupled by a third coolant flow line to receive coolant from the

Abstract: A method for analyzing fault log data and repair data to estimate time before a machine-disabling failure occurs is provided. The method allows for searching in a database of historical fault log data from a plurality of machines for the occurrence of respective fault patterns indicative of incipient failures of a respective machine subsystem. The method further allows for searching in a database of historical repair data for respective repairs executed on the respective machine subsystem. The method also allows for computing elapsed time between respective occurrences of the fault patterns and the executed repairs.

Abstract: An integrated metrology and lithography/etch system and method (10) for micro-electronics device manufacturing. A process control neural network (30) is used to develop an estimated process control parameter (32) for controlling an etching process (28). The process control neural network is responsive to a multi-parameter characterization of a patterned resist feature MPC(PR) (16) developed on a substrate. The process control parameter is used as a feed-forward control for the etching process to develop an actual final mask feature. A multi-parameter characterization of the actual final mask feature MPC(HM) (36) is used as an input to a training neural network (40) for mapping to an ideal process control parameter. The ideal process control parameter is compared to the estimated control parameter to develop an error parameter (46), which is then used to train the process control neural network.

Abstract: A system for collecting and analyzing shipment parameter data, e.g., temperature, vibration, acceleration, shock, humidity, barometric pressure, pH, transit time, container position, etc., affecting predicted statistical variables of articles is provided. Examples of the predicted statistical variables may include article life expectancy, warranty costs, service and/or maintenance schedules, etc. The system is made up of a plurality of data collection subsystems for respectively collecting shipment parameter data encountered by respective articles being shipped, and a data analysis subsystem coupled to receive the collected shipment data for adjusting the respective predicted statistical variables of the articles.

Abstract: A method for making a semiconductor device is provided. The method allows for depositing a layer of a doped dielectric. The method further allows for executing plasma etching so that one or more etchant gases flow over the layer of doped dielectric. A redepositing step allows for redepositing another layer of doped dielectric over the plasma etched layer. The present invention enables to remove crystal defects that may be present in the doped dielectric surface and improve surface planarity.

Abstract: A thin-film multi-layer high Q inductor spanning at least three metal layers is formed by forming a plurality of parallel first metal runners on the semiconductor substrate. A plurality of first and second vertical conductive vias are formed in electrical communications with each end of the plurality of metal runners. A plurality of third and fourth conductive vias are formed over the plurality of first and second conductive vias and a plurality of second metal runners are formed interconnecting the plurality of third and fourth conductive vias. The plurality of first metal runners are in a different vertical than the plurality of second metal runners such that the planes intersect. Thus one end of a first metal runner is connected to an overlying end of a second metal runner by way of the first and third vertical conductive vias. The other end of the second metal runner is connected to the next metal one runner by way of the second and fourth vertical conductive vias.

Abstract: The present invention discloses system and method for analyzing continuous parameter data from a malfunctioning locomotive or other large land-based, self-powered transport equipment. The method allows for receiving new continuous parameter data comprising a plurality of anomaly definitions from the malfunctioning equipment. The method further allows for selecting a plurality of distinct anomaly definitions from the new continuous parameter data. Respective generating steps allow for generating at least one distinct anomaly definition cluster from the plurality of distinct anomaly definitions and for generating a plurality of weighted repair and distinct anomaly definition cluster combinations. An identifying step allows for identifying at least one repair for the at least one distinct anomaly definition cluster using the plurality of weighted repair and distinct anomaly definition cluster combinations.