Patents Represented by Attorney, Agent or Law Firm Beyer EWeaver & Thomas,LLP
  • Patent number: 6322661
    Abstract: A plasma confinement arrangement for controlling the volume of a plasma while processing a substrate inside a process chamber using a plasma enhanced process is disclosed. The arrangement includes a first magnetic bucket having a plurality of first magnetic elements. The first magnetic elements being configured for producing a first magnetic field inside the process chamber. The arrangement further includes a second magnetic bucket having a plurality of second magnetic elements. The second magnetic elements being configured for producing a second magnetic field inside the process chamber. The second magnetic field being configured to combine with the first magnetic field to produce a resultant magnetic field between the first magnetic bucket and the second magnetic bucket. The resultant magnetic field being configured to permit by-product gas from the processing to pass through while substantially confining the plasma within a volume defined at least by the process chamber and the resultant magnetic field.
    Type: Grant
    Filed: November 15, 1999
    Date of Patent: November 27, 2001
    Assignee: Lam Research Corporation
    Inventors: Andrew D. Bailey, III, Alan M. Schoepp, Nicolas Bright