Abstract: A process for producing a pressurized oxygen stream by compressing and heating a feed gas stream containing elemental oxygen, and separating the heated feed gas stream using an ion transport module into an oxygen-depleted gas stream on the retentate side and an oxygen-containing gas stream on a permeate side. The permeate side of the ion transport membrane is purged using a gas stream containing steam to produce a pressurized gas stream containing oxygen and steam, and the gas stream is separated into the pressurized oxygen stream saturated with water vapor and a residual water stream.