Patents Represented by Attorney, Agent or Law Firm Brian D. Ogonowsky, E
  • Patent number: 6208675
    Abstract: A blower assembly for circulating gases in a laser chamber. The blower assembly includes a driving assembly operatively engaged to a drive side shaft for rotating a fan assembly. A first bearing assembly supports the drive side shaft. The blower assembly may further include an idle side shaft for supporting the fan assembly and a second bearing assembly circumscribing the idle side shaft. The driving assembly includes a motor disposed over a rotor. The fan assembly includes a pair of hubs supporting a plurality of blades. The first and second bearing assemblies comprise a ceramic compound, such as silicon nitride (Si3N4), and are lubricated with a synthetic oil, such as perfluoropolyalkylether (PFPE).
    Type: Grant
    Filed: August 27, 1998
    Date of Patent: March 27, 2001
    Assignee: Cymer, Inc.
    Inventor: R. Kyle Webb