Abstract: A package that resists creation of particles in a package cavity. A package according to one embodiment of the present invention contains a mechanical device attached to the floor of the package substrate. Epoxy typically is used to attach the device. Electrical connections are provided by bond wires connecting bond pads on the substrate with bond pads on the device. A window is attached to the substrate to form a cavity around the device. A thin masking layer on portions of the package cavity surface prevents the surface from generating particles. The thin masking layer may be any material that resists particle generation. The masking layer on the cavity walls optionally extends out of the cavity and onto the upper surface of the package.

Abstract: A method of lubricating MEMS devices using fluorosurfactants 42. Micro-machined devices, such as a digital micro-mirror device (DMD™) 940, which make repeated contact between moving parts, require lubrication in order to prevent the onset of stiction (static friction) forces significant enough to cause the parts to stick irreversibly together, causing defects. These robust and non-corrosive fluorosurfactants 42, which consists of a hydrophilic chain 40 attached to a hydrophobic fluorocarbon tail 41, are applied by nebulization and replace the more complex lubricating systems, including highly reactive PFDA lubricants stored in polymer getters, to keep the parts from sticking. This lubrication process, which does not require the use of getters, is easily applied and has been shown to provide long-life, lower-cost, operable MEMS devices.

Abstract: A method and system that objectively measures the convergence and focus of a 2 or 3 spatial light modulator (SLM) projection display. The system uses five (5) CCD cameras and a frame grabber to store red, green, and blue (R-G-B) data from selected pixels located in the corners and center of the projector's field-of-view. The horizontal and vertical locations for the R-G-B pixels at each of the five locations is determined and the delta (?) displacement of the green and blue pixels, relative to the reference red pixel, is calculated and used to converge the image. The optical focus of the system is also determined using a Fast Fourier Transform (FFT). The FFT is performed on this same data and a power spectrum summation beyond the first mimima is determined. The focus is then adjusted to maximize this value.

Abstract: A nebulization system, which creates a uniform fog of tiny suspended liquid droplets, to lubricate the surfaces of MEMS devices. These droplets fall over the edge of a baffle and are then mixed with an umbrella-like sheet of N2 turbulation gas to generate a uniform cloud of droplets that fill a passivation chamber. The MEMS device is then positioned in this uniform cloud of lubricant droplets for a specified amount of time, thereby uniformly lubricating all the surfaces of the device. The system uses a laser monitoring approach to control the uniformity of the lubricant cloud by providing feedback to the system to control the flow of gases. The system also equalizes the pressure around the sample device seal to prevent gases from entering or exiting the chamber and thereby influencing the environment inside the chamber.

Abstract: Disclosed herein is a micromirror array device package having a light blocking area for reducing unexpected light scattering from the surfaces of the posts.

Abstract: According to one embodiment, a method for compensating for inadequate bit resolution in a light processing system includes receiving a plurality of values each indicative of an intensity level for a pixel to be displayed. Each of the values is represented by a plurality of bits of data. The method also includes determining a quantization step size for the plurality of bits of data. For at least one particular pixel of the pixels, a set of consecutive pixels including the particular pixel is selected. The method also includes determining a difference between the value associated with the particular pixel in the set and each value associated with the other pixels in the set, and also determining that all of the determined differences are less than or equal to the quantization step size. In response, a filtered value for the particular pixel in the set is generated based at least on some of the pixels in the set in addition to the particular pixel.

Abstract: As robust hinge post structure for use with torsional hinged devices such as micromirrors and method of manufacturing is disclosed. The fabrication process uses a protective layer such as BARC on the bottom of the aperture used to form the hinge post structure to protect an oxide layer during an etching step. The oxide layer, in turn protects the metal layer at the bottom of the aperture. Therefore, the metal layer, the oxide layer, and the protective layer prevent the erosion and/or pitting of the bottom electrode during a cleaning process, and provide additional support to the structure.

Abstract: In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and/or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror.

Abstract: An apparatus for use with a digital micro-mirror includes a hinge disposed outwardly from a substrate. The hinge is capable of at least partially supporting a micro-mirror disposed outwardly from the hinge. The micro-mirror is capable of being selectively transitioned between an on-state position and an off-state position. In one particular embodiment, the hinge comprises a substantially flat profile for at least a portion of the hinge disposed between a first hinge post of the hinge and a mid-point of the hinge. The apparatus also includes a plurality of process control voids formed within a conductive layer disposed inwardly from the hinge. In one particular embodiment, the substantially flat profile is at least partially created from the plurality of process control voids.

Abstract: A method of producing an image comprising impinging a beam of light on first region of a dynamic filter. The dynamic filter comprising at least two regions having different light transmission characteristics. A first region of the dynamic filter transmits a first transmitted portion of the beam of light and reflects a first reflected portion of the beam of light. Impinging at least some of the first reflected portion of the beam of light on a second region of the dynamic filter. The second region of the dynamic filter transmitting a second transmitted portion. The first and second transmitted portions are modulated.

Abstract: A method of reducing ringing artifacts in image data that has been filtered with a high frequency emphasis filter. For each filtered data value, a local variance is calculated from data values at neighboring filter taps. This variance is compared to a threshold, and if the threshold is exceeded, the filtered data value is limited between local minimum and maximum values. A method of reducing noise, also using the local variance, is also described.

Abstract: A micromirror array fabricated on a semiconductor substrate. The array is comprised of three operating layers. An addressing layer is fabricated on the substrate. A hinge layer is spaced above the addressing layer by an air gap. A mirror layer is spaced over the hinge layer by a second air gap. The hinge layer has a hinge under and attached to the mirror, the hinge permitting the mirror to tilt. The hinge layer further has spring tips under the mirror, which are attached to the addressing layer. These spring tips provide a stationary landing surface for the mirror.

Abstract: According to one embodiment of the present invention, a method for color illumination for an image display system includes field sequentially operating an array of emitters to generate a sequence of light beams. Each light beam includes one color. A first light beam of a first color is combined with a second light beam of a second color. The first and second light beams are combined in an optical path to travel concurrently. The combination of the first and second light beams results in a composite color coordinate. The combination of the first and second light beams are directed at a spatial light modulator operable to receive the combination and produce a desired color on a display.

Abstract: A display system includes a light source 110 and a spatial light modulator 122 located to receive light from the light source. The spatial light modulator (e.g., a DMD) includes a number of independently controllable elements that are activated for a period of time to display light of a desired brightness. A light sensor 136 is located to determine a characteristic of light from the light source 110. A control circuit 126 is coupled to the spatial light modulator 122 and controls the period of time that the independently controllable elements are activated. This period of time is based at least in part by an input received from the light sensor 136.

Abstract: A packaged micromechanical device (100) having a blocking material (116) encapsulating debris-generating regions thereof. The blocking material (116) prevents the generation of debris that could interfere with the operation of the micromechanical device (100). Debris-generating regions of the device (100), including debris-creating sidewalls and any debris-harboring cavities, as well as electrical connections (108) linking the device (100) to the package substrate (102) are encapsulated by the blocking material (116). The blocking material (116) avoids contact with any debris-intolerant regions (118) of the device (100). A package lid (124), which is glass in the case of many DMD packages, seals the device (100) in a package cavity (120).

Abstract: A sequential color filter and display system. The sequential color filter comprising: a set of at least three color filters (102). The color filters can be arranged in a cylindrical configuration and may have a cooling fan (506) attached. The set of color filters typically comprises a red filter, a green filter, and a blue filter, and can comprise a red filter, a green filter, a blue filter, and a clear filter. A motor may be connected to the set of color filters for rotating the set of color filters and the cooling fan about a common axis. The color filters may be arranged in a spiral configuration when a cylindrical sequential color filter is provided. The preceding abstract is submitted with the understanding that it only will be used to assist in determining, from a cursory inspection, the nature and gist of the technical disclosure as described in 37 C.F.R. § 1.72(b). In no case should this abstract be used for interpreting the scope of any patent claims.

Abstract: A method and system in which a semiconductor wafer having a plurality of dies is inspected through a visual inspection and/or an electrical test. If certain of the dies on the wafer pass the inspection, then windows are mounted or affixed above those certain dies while they are still a part of the wafer.

Abstract: According to one embodiment a method for aligning a light source includes providing a lamp and a lamp interface. The lamp interface has an alignment aperture disposed thereon. The method also includes aligning the lamp with respect to the lamp interface until a desired amount of light is focused on the alignment aperture. The method further includes fixing the lamp to the lamp aperture to form an aligned lamp assembly after obtaining a desired lamp alignment. Then the aligned lamp assembly is coupled to an integrating rod.

Abstract: A wire bonder (900) with a rigid pedestal (902) having resilient inserts (920). A package (904) placed on the pedestal (902) contains an electrical device (906). The bond pads on the electrical device (906) are electrically connected to bond pads on the package (904) by a series of bond wires (908) through use of a well know bonding process. A vacuum source holds the package (904) against the pedestal (902) deforming the resilient strips (920) located in the rigid member (902) of the pedestal and ensuring good contact between the ground pads of the package (904) and conductive resilient members (920). The resilient members (920) are conductive and electrically connect the package grounds to a system ground (922).

Abstract: Prism elements having TIR surfaces placed in close proximity to the active area of a SLM device to separate unwanted off-state and/or flat-state light from the projection ON-light bundle. The TIR critical angle of these prisms is selected to affect either the off-state light or additionally, any portion of flat-state light reflected from the SLM. To further improve the optical performance of the system, these TIR prisms can be attached directly to the SLM package, completely eliminating the package window.