Patents Represented by Attorney Chernoff Vilhauer McClung & Stensel, LLP

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  • Probe construction using a recess
    Patent number: 6860009
    Abstract: A method of constructing a probe which includes providing a substrate and creating a first substantially asymmetrical recess within the substrate. A conductive material is located within the recess and a conductive trace is electrically connected with the conductive material. A membrane supports the conductive trace, wherein the conductive material is located between the membrane and the substrate. The substrate is removed from the conductive material.
    Type: Grant
    Filed: March 22, 2001
    Date of Patent: March 1, 2005
    Assignee: Cascade Microtech, Inc.
    Inventors: Reed Gleason, Michael A. Bayne, Kenneth Smith, Timothy Lesher, Martin Koxxy