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Patents
Patents Represented by Attorney, Agent or Law Firm Cheryl Figlin
Patents Represented by Attorney, Agent or Law Firm Cheryl Figlin
Method to create a copper diffusion deterrent interface
Patent number:
6683002
Abstract:
Method and product for forming a dual damascene interconnect structure, wherein depositing a copper sulfide interface layer as sidewalls to the opening deters migration or diffusing of copper ions into the dielectric material.
Type:
Grant
Filed:
August 10, 2000
Date of Patent:
January 27, 2004
Assignee:
Chartered Semiconductor Manufacturing Ltd.
Inventors:
Simon Chooi, Yakub Aliyu, Mei Sheng Zhou, John Leonard Sudijono, Subhash Gupta, Sudipto Ranendra Roy, Paul Kwok Keung Ho, Yi Xu
Semi-automated probe bender
Patent number:
6604395
Abstract:
A method and apparatus for bending probe pins that is semi-automated and uses machine vision to eliminate human error.
Type:
Grant
Filed:
July 23, 2001
Date of Patent:
August 12, 2003
Assignee:
St Assembly Test Services Ltd.
Inventor:
Chong Meng Lee