Abstract: The present invention provides a novel method of etching nickle/iron alloy which employs a novel etchant. The novel etchant, which etches nickle/iron alloy but not copper, comprises an aqueous solution of ferric ammonium sulfate, and an acid selected from the group consisting of: sulfuric acid; phosphoric acid; and mixtures thereof.
Type:
Grant
Filed:
May 28, 1996
Date of Patent:
March 3, 1998
Assignee:
International Business Machines Corporation
Inventors:
Kathleen Lorraine Covert, Lisa Jeanine Jimarez, Krystyna Waleria Semkow