Abstract: Base resistance in an integrated injection logic cell is reduced by providing a low resistance conductive path over the device cell and contacting the base regions of vertical transistors in the cell. In fabricating the I.sup.2 L cell a first intrinsic polysilicon layer is formed over the surface of the device cell, and N-type dopant is diffused through the polysilicon layer to form the N+ collectors of the NPN vertical transistors. Silicon oxide is formed over the doped polysilicon and the undoped intrinsic polysilicon is then removed. Exposed edge portions of the N doped polysilicon is then oxidized to completely insulate the surface of the polysilicon. A second layer of intrinsic polysilicon is then formed over the device cell and P type dopant is diffused through the second polysilicon layer to form the emitter and collector of a lateral PNP transistor and to contact the base regions of the NPN vertical transistors between the N+ collectors.
Type:
Grant
Filed:
July 28, 1983
Date of Patent:
April 23, 1985
Assignee:
Fairchild Camera & Instrument Corporation