Patents Represented by Attorney Clif L. Anderson
  • Patent number: 4512075
    Abstract: Base resistance in an integrated injection logic cell is reduced by providing a low resistance conductive path over the device cell and contacting the base regions of vertical transistors in the cell. In fabricating the I.sup.2 L cell a first intrinsic polysilicon layer is formed over the surface of the device cell, and N-type dopant is diffused through the polysilicon layer to form the N+ collectors of the NPN vertical transistors. Silicon oxide is formed over the doped polysilicon and the undoped intrinsic polysilicon is then removed. Exposed edge portions of the N doped polysilicon is then oxidized to completely insulate the surface of the polysilicon. A second layer of intrinsic polysilicon is then formed over the device cell and P type dopant is diffused through the second polysilicon layer to form the emitter and collector of a lateral PNP transistor and to contact the base regions of the NPN vertical transistors between the N+ collectors.
    Type: Grant
    Filed: July 28, 1983
    Date of Patent: April 23, 1985
    Assignee: Fairchild Camera & Instrument Corporation
    Inventor: Madhukar B. Vora