Patents Represented by Attorney Corsaro & Associates Co., LPA
  • Patent number: 7625471
    Abstract: A sputtering cathode assembly attachable to a cathode mounting plate for a thin-film vapor deposition chamber. The cathode assembly includes a magnet module and a cathode body generally coextensive with and sealingly housing the magnet module and defining a water channel between a top plate of the cathode body and a cooling channel plate of the magnet module. An elongated target is releasably connected atop and coextensive with the top plate and secured in place by a unique threaded fastener engagement between a target clamp and an edge portion of the cathode body whereby the target is replaceable without disassembly of the cathode body. Unique replaceable elongated fastener receiving inserts releasably secure said target against the target plate to effect target replacement without disassembly of the cathode body.
    Type: Grant
    Filed: January 17, 2006
    Date of Patent: December 1, 2009
    Assignee: Mustang Vacuum Systems, LLC
    Inventors: Robert Choquette, Patrick Manley
  • Patent number: D599419
    Type: Grant
    Filed: June 18, 2007
    Date of Patent: September 1, 2009
    Inventor: Carlo Chiuchiarelli