Patents Represented by Attorney Darryl P. Edwards & Angell, LLP Frickey

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  • Antihalation compositions
    Patent number: 6165697
    Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
    Type: Grant
    Filed: November 15, 1991
    Date of Patent: December 26, 2000
    Assignee: Shipley Company, L.L.C.
    Inventors: James W. Thackeray, George W. Orsula
  • Positive type photoresist composition
    Patent number: 6156474
    Abstract: To provide a positive type photoresist composition which is capable of forming a resist pattern having an excellent adhesion to a substrate, a positive type photoresist composition comprising a polymer containing a specified amount of a polypropylene oxide group and a polyethylene oxide group is provided.
    Type: Grant
    Filed: December 2, 1998
    Date of Patent: December 5, 2000
    Assignee: Shipley Company, L.L.C.
    Inventors: Sigeki Nakano, Akira Awaji, Teruaki Ogawa, Kenta Takahashi