Abstract: A registration pattern data generating portion is configured of a pattern set data generator for rough order error estimation and a pattern set data generator for fine order error estimation. When an error is estimated, a pattern set for rough order error estimation is checked first so as to roughly determine the size of the error and then another pattern set for fine order error estimation is checked so as to finely determine the size of the error. Thus, checking the two types of pattern sets makes it possible to exactly recognize the error in rough and fine units, providing fast and exact error determination.