Abstract: An air separation plant having prefabricated heat exchanger and distillation column sections. The heat exchanger can be used in air expansion, waste expansion and product expansion plants by simply connecting the appropriate piping to the heat exchanger. The air separation unit is built up of standardized sections preferably utilizing structured packing. Simplified liquid distributors and supports are used in order to distribute liquid to the packing and to support the packing within the column, respectfully.
Type:
Grant
Filed:
October 27, 1997
Date of Patent:
November 16, 1999
Assignee:
The BOC Group, Inc.
Inventors:
Joseph Straub, Anish Mehta, Karl O. Toppel
Abstract: This invention relates to gas treatment apparatus and methods and particularly, but not exclusively, to such apparatus and methods for use with exhaust products from semi-conductor manufacturing process.A reactor column 10 has an inlet 11 at the bottom and an outlet 12. Between the inlet and outlet it is divided into three sequential stages containing: silicon or silicon containing materials; lime or soda lime and copper oxide or copper oxide reagents.