Abstract: A III-V compound light emitter is integrated with Si-based actuators. The proposed devices take advantage of the superior optical properties of III-V compounds and the superior mechanical properties of Si, as well as mature fabrication technologies of Si-Micro-Electro-Mechanical Systems (MEMS). The emitter can be a light emitting diode (LED), a vertical cavity surface emitting laser (VCSEL) or an edge emitting laser.
Type:
Grant
Filed:
December 11, 1998
Date of Patent:
May 20, 2003
Assignee:
Xerox Corporation
Inventors:
Decai Sun, Ross D. Bringans, Christopher L. Chua, Philip D. Floyd, Eric Peeters, Joel A. Kubby, Alex T. Tran