Patents Represented by Attorney DiBerardino Law LLC
  • Patent number: 7715459
    Abstract: An apparatus/method which may comprise: a very high power line narrowed lithography laser light source which may comprise: a solid state seed laser system which may comprise: a pre-seed laser providing a pre-seed laser output; a fiber amplifier receiving the pre-seed laser output and providing an amplified seed laser pulse which may comprise: a pulse having a nominal wavelength outside of the DUV range; a frequency converter converting to essentially the wavelength of the amplifier gain medium; a first and a second gas discharge laser amplifier gain medium operating at different repetition rates from that of the seed laser output; a beam divider providing the amplifier gain mediums with output pulses from the seed laser; a beam combiner combining the outputs of each respective amplifier gain medium to provide a laser output light pulse beam having the pulse repetition rate of the solid state seed laser system.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: May 11, 2010
    Assignee: Cymer, Inc.
    Inventors: Daniel J. W. Brown, William N. Partlo, Richard L. Sandstrom
  • Patent number: 7695341
    Abstract: A toy includes a sensor that senses a condition, a movable region, and an actuator coupled to the movable region to move the movable region in a direction relative to the sensed condition. The movable region is coupled to a body that houses electromechanical components for sensing conditions and for moving the movable region in response to the detected conditions.
    Type: Grant
    Filed: November 27, 2002
    Date of Patent: April 13, 2010
    Assignee: Hasbro, Inc.
    Inventors: Richard J Maddocks, Leif J. Askeland, Michael J. Iaconis, Adam B. Craft, Robert P. Felice
  • Patent number: 7643529
    Abstract: An apparatus/method may comprise a line narrowed pulsed lithography laser light source which may comprise: a seed pulse providing laser system which may comprise: a first pulsed seed laser producing seed pulses at a rate of X kHz; a second pulsed seed laser producing seed pulses at a rate of X kHz; an amplification system which may comprise: a first amplifier gain system which may comprise a first and a second pulsed gas discharge amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½ X kHz on output pulses from the first seed laser; a second amplifier gain system which may comprise a first and a second pulsed amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½ X kHz on output pulses from the second seed laser.
    Type: Grant
    Filed: October 31, 2007
    Date of Patent: January 5, 2010
    Assignee: Cymer, Inc.
    Inventors: Daniel J. W. Brown, William N. Partlo, Richard L. Sandstrom
  • Patent number: 7630424
    Abstract: A method/apparatus may comprise operating a line narrowed pulsed excimer or molecular fluorine gas discharge laser system by using a seed laser oscillator to produce an output which may comprise a first gas discharge excimer or molecular fluorine laser chamber; a line narrowing module; a laser amplification stage which may comprise a ring power amplification stage; the method of operation may the steps of: selecting a differential timing between an electrical discharge between a pair of electrodes in the first laser chamber and in the second laser chamber which at the same time keeps ASE below a selected limit and the pulse energy of the laser system output light beam of pulses essentially constant.
    Type: Grant
    Filed: October 30, 2007
    Date of Patent: December 8, 2009
    Assignee: Cymer, Inc.
    Inventors: Alexander I. Ershov, William N. Partlo, Daniel J. W. Brown, Igor V. Fomenkov