Patents Represented by Attorney DiBerardino McGovern IP Group LLC
  • Patent number: 8322648
    Abstract: The invention provides a hovering aerial vehicle with removable rotor arms and protective shrouds. Removing the shrouds reduces the weight of the vehicle and increases flight time. Removing the rotor arms makes the vehicle easier to transport. Removable rotor arms also simplify field repair or replacement of damaged parts.
    Type: Grant
    Filed: May 14, 2009
    Date of Patent: December 4, 2012
    Assignee: Aeryon Labs Inc.
    Inventors: David Kroetsch, Mike Peasgood, Dale Brubacher-Cressman, Cristian Cherler, Stephen Marchetti
  • Patent number: 8304752
    Abstract: A method for producing extreme ultraviolet light includes producing a target material at a target location; supplying pump energy to a gain medium of at least one optical amplifier that has an amplification band to produce an amplified light beam; propagating the amplified light beam through the gain medium using one or more optical components of a set of optical components; delivering the amplified light beam to the target location using one or more optical components of the optical component set; producing with a guide laser a guide laser beam that has a wavelength outside of the amplification band of the gain medium and inside the wavelength range of the optical components; and directing the guide laser beam through the optical component set to thereby align one or more optical components of the optical component set.
    Type: Grant
    Filed: December 15, 2009
    Date of Patent: November 6, 2012
    Assignee: Cymer, Inc.
    Inventors: Igor V. Fomenkov, Alexander I. Ershov, William N. Partlo, Jason Paxton, Nam-Hyong Kim, Jerzy R. Hoffman
  • Patent number: 8259764
    Abstract: A method and apparatus is disclosed for operating a laser output light beam pulse line narrowing mechanism that may comprise a nominal center wavelength and bandwidth selection optic; a static wavefront compensation mechanism shaping the curvature of the selection optic; an active wavefront compensation mechanism shaping the curvature of the selection optic and operating independently of the static wavefront compensation mechanism. The method and apparatus may comprise the nominal center wavelength and bandwidth selection optic comprises a grating; the static wavefront compensation mechanism applies a pre-selected bending moment to the grating; the active wavefront compensation mechanism applies a separate selected bending moment to the grating responsive to the control of a bending moment controller based on bandwidth feedback from a bandwidth monitor monitoring the bandwidth of the laser output light beam pulses. The active wavefront compensation mechanism may comprise a pneumatic drive mechanism.
    Type: Grant
    Filed: June 21, 2006
    Date of Patent: September 4, 2012
    Assignee: Cymer, Inc.
    Inventors: Igor V. Fomenkov, William N. Partlo, Daniel J. Reiley, James K. Howey, Stanley C. Aguilar