Abstract: An apparatus and method for measuring the current distribution in an integrated circuit with high time resolution is described incorporating a magneto-optic film, a linearly polarized light beam and a means for measuring the magneto-optic polarization rotation of a light beam and circuitry for synchronizing test pulses in an integrated circuit. The invention overcomes the problem of determining current distribution as a function of time and location in an integrated circuit with 1 psec time resolution and 1 micrometer spatial resolution.
Type:
Grant
Filed:
October 30, 1992
Date of Patent:
September 19, 1995
Assignee:
International Business Machines Corporation