Patents Represented by Law Firm Dority & Mannings, P.A.
  • Heating device for semiconductor wafers
    Patent number: 5970214
    Abstract: An apparatus for heat treating semiconductor wafers is disclosed. The apparatus includes a heating device which contains an assembly of light energy sources for emitting light energy onto a wafer. In particular, the light energy sources are positioned such that many different radial heating zones are created on a wafer being heated. The light energy sources form concentric rings. Tuning light sources are then placed in between the concentric rings of light.
    Type: Grant
    Filed: May 14, 1998
    Date of Patent: October 19, 1999
    Assignee: AG Associates
    Inventor: Arnon Gat