Abstract: A method of plasma etching Ga-based compound semiconductors includes providing a process chamber and a source electrode adjacent to the process chamber. The process chamber contains a sample comprising a Ga-based compound semiconductor. The sample is in contact with a platen which is electrically connected to a first power supply, and the source electrode is electrically connected to a second power supply. The method includes flowing SiCl4 gas into the chamber, flowing Ar gas into the chamber, and flowing H2 gas into the chamber. RF power is supplied independently to the source electrode and the platen. A plasma is generated based on the gases in the process chamber, and regions of a surface of the sample adjacent to one or more masked portions of the surface are etched to create a substantially smooth etched surface including features having substantially vertical walls beneath the masked portions.
Type:
Grant
Filed:
December 15, 2009
Date of Patent:
December 25, 2012
Assignee:
The Board of Trustees of the University of Illinois
Abstract: A method and apparatus for reconstruction of a region of interest for an object is provided. The reconstruction of the object may be based on chords which may fill a part, all, or more than all of the region of interest. Using chords for reconstruction may allow for reducing data acquired and/or processing for reconstructing a substantially exact image of the ROI. Moreover, various methodologies may be used in reconstructing the image, such as backprojection-filtration, and modified filtration backprojection.
Type:
Grant
Filed:
January 19, 2011
Date of Patent:
February 21, 2012
Assignee:
The University of Chicago
Inventors:
Xiaochuan Pan, Yu Zou, Lifeng Yu, Chien-Min Kao, Martin King, Maryellen Giger, Dan Xia, Howard Halpern, Charles Pelizzari, Emil Y. Sidky, Seungryong Cho
Abstract: In a method of changing the trigger threshold of a brake stand-by function of a vehicle brake, the brake stand-by function generates brake pressure in wheel brakes without application of a brake pedal. The trigger threshold value for the brake stand-by function is determined by the following steps: a) determining an average return speed of an accelerator pedal; b) changing the trigger threshold value for the brake stand-by function depending on the determined average return speed of the accelerator pedal. The method allows reducing the number of spurious releases of the brake stand-by function, which a sportive driving style brings about. In another embodiment of the method, the position of the accelerator pedal is used to change the trigger threshold value for the brake stand-by function.
Abstract: A device for axially conveying fluids, wherein the conveyor part thereof is entirely magnetically borne and the radial bearing thereof is provided with sufficient rigidity and efficiently dampened, whereby problems encountered when passing through critical speeds and the disadvantageous effects of hydrodynamic and mechanical imbalance of the rotor are avoided. The magnetic bearing is combined with a hydrodynamic bearing.
Type:
Grant
Filed:
October 31, 2007
Date of Patent:
May 3, 2011
Assignee:
Berlin Heart GmbH
Inventors:
Peter Nuesser, Johannes Mueller, Hans-Erhard Peters, Joerg Mueller, Werner Neumann, Kurt Graichen, Andreas Arndt