Abstract: There is described method and apparatus to create multi-dimensional non-spatial histograms of surfaces and to compare such histograms to show whether the surfaces substantially conform to one another. This analysis is particularly applicable to comparing die on wafers to determine whether manufactured devices conform to a master or whether one die is like another.

Abstract: Sequential sputtered film deposition of distinct materials on a workpiece is obtained with discrete targets composed of such distinct materials disposed on separate area portions of a common cathode/heatsink. Sputtering without cross contamination of the deposited films is enabled during an interval of relative motion between the target and workpiece or in an indexed static relative disposition, wherein the workpiece projection is entirely proximate one such portion to deposit the respective layer.

Abstract: Uniform electron irradiation of tissue over a large solid angle is accomplished by directing an electron beam of selectively variable energy and intensity through a hollow needle to emerge in the interior of a tissue equivalent scattering body adapted for insertion into a surgical opening. Multiple scattering of electrons in the interior of the scattering body produces a flux emerging from the surface of the body, which flux exhibits a desired distribution of intensity and kinetic energy (depth of penetration) over a large solid angle interval for radiation treatment of surrounding tissue.

Abstract: A substrate processing system includes a processing chamber, an electrically floating substrate holder positioned in the chamber, a gas source for supplying a process gas to the chamber, at least one ion source located in the chamber, and a power source for energizing the ion source by positively biasing the anode and negatively biasing the cathode in a train of pulses of selectably variable duty cycle and magnitude to maintain a selected time averaged current, the bias in each instance being relative to the chamber. The ion source ionizes the process gas producing ions for processing a substrate disposed on the floating substrate holder in the chamber. The floating substrate is biased in accord with the net charge thereon as controlled by the energetic electron flux. One embodiment includes two such ion sources.

Abstract: An inversion pulse for wideband application is obtained from a simple nonlinear amplitude modulation wherein the amplitude is modulated in accord with A(t)=A.sub.0 {1-.vertline. sin .beta.t.vertline..sup.n } and the entire pulse is frequency modulated such that the phase varies as .phi.(t)=.phi..sub.0 +1/2 kt.sup.2.

Abstract: A gas flow distribution system accumulates a sample from a sample bearing carrier gas in a micro-accumulator, delivers it using a carrier gas to a gas chromatography column, and supplies a carrier gas to the gas chromatography column to facilitate separation of the sample into sample components and transport the sample components to a mass spectrometer for trace vapor detection and analysis or testing in real time. The system is made of inert components and configured to have low dead volume for improved performance and accuracy of detection. External valves are employed for easy management and balance of the flow in the system to minimize operation time and facilitate continuous accumulation, delivery, and testing of the sample. The delivery of the sample to the gas chromatography column using an electrically heated cold trap as the micro-accumulator can be performed extremely fast.

Abstract: Observation of transient phenomena in an oversampled regime is implemented with a time correction obtained by prepending one or more pseudo datums to the oversampled data to constitute an effective negative delay for the oversampled data set including the pseudo datums. For an oversampling factor N and oversampling rate .omega..sub.s, a digital filter furnishes downsampled data uniformly spaced in time by N/.omega..sub.s and positioned at n (N/.omega..sub.s) where n is the discrete downsampled time coordinate.

Abstract: An inductively coupled plasma spectrometer including shielding/sampling means (1) located between a plasma torch (3) and an optical system (4) of the spectrometer, wherein said shielding/sampling (1) means is associated with an enclosure (9) for the plasma torch such that a relatively high independance path (10, 11) is established for limiting flow of electrical current between said shielding/sampling means (1) and said enclosure (9).

Abstract: A gas flow distribution system accumulates a sample from a sample bearing carrier gas in a micro-accumulator, delivers it using a carrier gas to a gas chromatography column, and supplies a carrier gas to the gas chromatography column to facilitate separation of the sample into sample components and transport the sample components to a mass spectrometer for trace vapor detection and analysis or testing in real time. The system is made of inert components and configured to have low dead volume for improved performance and accuracy of detection. External valves are employed for easy management and balance of the flow in the system to minimize operation time and facilitate continuous accumulation, delivery, and testing of the sample. The delivery of the sample to the gas chromatography column using an electrically heated cold trap as the micro-accumulator can be performed extremely fast.

Abstract: Radiation damping effects in NMR are compensated by splitting the amplified NMR signal induced in the main probe coil to obtain a correction signal, phase shifting the correction signal to obtain a feedback signal and impressing the feedback signal onto the sample through means independent of the main probe coil.

Abstract: An improved method of using an ion trap mass spectrometer is disclosed. According to the method an asymmetrical trapping field is applied to the trap. Preferably, the asymmetrical trapping field comprises a quadrupole field and a dipole field having the same frequency. In addition, higher order trapping field components, such as hexapole or octopole fields, may also be included, and the electrodes of the ion trap can be shaped to introduce such higher order field components. The effect of the asymmetrical trapping field of the present invention is to cause the center of the trapping field to be displaced from the mechanical center of the ion trap. A supplemental quadrupole field is then applied to the ion trap, the center of the supplemental quadrupole field being located at the mechanical center of the trap, i.e., it is displaced from the center of the trapping field. The supplement quadrupole field and the trapping field may be viewed as forming one combined field which acts upon the ions in the trap.

Abstract: An optical pulse propogating in an optical guide of an electro-optic medium interacts with a coplanar RF traveling wave to shift the optical wavelength. The RF phase is resynchronized to the optical pulse phase with spatial periodicity to provide a desired phase relationship between RF and optical radiation. A unidirectional incremental wavelength shifter comprises a frequency multiplexer for soliton communication and a symmetrical sideband modulator of this type varies the spectral width of probe illumination in an atomic absorption spectrometer probe beam.

Abstract: A broadband optical detector is disposed to measure the total intensity I(.lambda., .alpha.) attributed to a portion of the optical spectrum passed by a sharp bandgap optical transmission element as the bandgap is caused to translate over a desired wavelength interval by a band gap control parameter, T. The differential spectrum of the incident optical radiation is recovered by the differentiation of I(.lambda., .alpha.) in respect to the parameter T.

Abstract: A method of detecting ions of a single ion species that have been selectively stored in a quadrupole ion trap mass spectrometer is disclosed. After the selected ion species is isolated the trapping field in rapidly changed to cause ions to leave the ion trap in the axial direction where they are detected using a conventional detector. Preferably, a dipole pulse is applied to the ion trap simultaneously with the reduction of the trapping field, such that all of the ions are caused to leave the trap in a single direction, doubling the ion current over prior art methods. The method of the invention allows ejection of all of the ions in a time period which is nearly twenty times faster than the prior art resonance ejection scanning technique, and without the artifacts in the signal current caused by frequency beating.

Abstract: The interior surfaces of an ion trap or ionization chamber is coated with an inert, inorganic non-metallic insulator or semiconductor material for the passivation of such surfaces so as to minimize absorption, degradation or decomposition of a sample in contact with the surface.

Abstract: A method of isolating selected ion species in a quadrupole ion trap mass spectrometer is disclosed. One or more ranges of masses to be eliminated from the ion trap are ejected by applying a supplemental dipole excitation waveform, sparsely populated with frequency components, while the trapping field is modulated. The spacing of the frequency components in the supplemental excitation waveform varies across the range of frequencies in the waveform. Preferably, the frequency range is divided into a plurality of subranges, and the spacing of the frequency components in each of the subranges is constant. A method of creating a master set of frequencies used for generating a supplemental excitation waveform is also shown. Likewise, a method of calculating edge frequencies defining a gap in the mass spectrum that is excited by the supplemental waveform is also shown.

Abstract: A solid-state detector for use in an atomic spectrometer comprises a plurality of arrays of sensing elements, or pixels, each of the arrays being positioned along and on the locations of spectral signals on a focal plane of an echelle grating spectrometer. The sensing elements are positioned along the many diffraction orders presented on a two-dimensional echelle grating focal plane so that at least one element is located at each and every resolution element regardless of global x-y coordinate positioning of the elements or with reference to each other. The result is a series of skewed lines of sensing elements, those lines being in the same shape as the series of diffraction order lines which comprise an echelle spectrum. The solid-state detector is particularly useful in an atomic spectrometer wherein an echelle grating is used to diffract incident radiation such that the various components of the radiation may be observed.

Abstract: An NMR receiver includes an analog to digital converter for sampling a nuclear magnetic resonance probe output signal at a frequency that is less than the probe signal center frequency and is at least twice the probe signal bandwidth.

Abstract: The present invention relates to improving the sensitivity of an NMR system for electrically conductive (polar) NMR samples. Many NMR samples use water or a salt solution of water or other electrically conductive liquid as a solvent for biologically active materials. When such a sample is placed in the probe coil of an NMR spectrometer, electrical losses in the conductive material lowers the Q of the receiving circuit and thereby reduces the sensitivity of the spectrometer. These electrical losses can be greatly reduced by breaking up the current paths within the sample. This can be achieved by a special sample cell that compartmentalizes the sample with electrical insulating material reducing the electrical current paths.

Abstract: The volume magnetic susceptibility of an NMR probe is established and maintained at a desired value, such as a value characterizing other components of the probe, by a linear combination of partial pressures of respective fluids introduced into the sensitive volume of the probe.