Abstract: A vibrating multisensor, each using two accelerometers which are vibrated along straight lines perpendicular to their sensing axes. In one embodiment, the sensing axes are co-linear, and in another embodiment the sensing axes are perpendicular. The accelerometers preferably use a proof mass and flexure suspension made on a silicon wafer sandwiched between two other wafers that carry electrodes both for sensing displacement and forcing of the central accelerometer wafer.
Abstract: A vibrating multisensor, each using two accelerometers which are vibrated along straight lines perpendicular to their sensing axes. The sensing axes are co-linear, the accelerometers are vibrated in phase opposition along parallel axes. The accelerometers preferably use a proof mass and flexure suspension made on a silicon wafer sandwiched between two other wafers that carry electrodes both for sensing displacement and forcing of the central accelerometer wafer.