Abstract: This disclosure discusses cleaning of semiconductor wafers after the Chemical-Mechanical Planarization (CMP) of the wafer during the manufacturing of semiconductor devices. Disclosed is an acidic chemistry for the post-CMP cleaning of wafers containing metal, particularly copper, interconnects. Residual slurry particles, particularly copper or other metal particles, are removed from the wafer surface without significantly etching the metal, leaving deposits on the surface, or imparting significant organic (such as carbon) contamination to the wafer while also protecting the metal from oxidation and corrosion. Additionally, at least one strong chelating agent is present to complex metal ions in solution, facilitating the removal of metal from the dielectric and preventing re-deposition onto the wafer. Using acidic chemistry, it is possible to match the pH of the cleaning solution used after CMP to that of the last slurry used on the wafer surface.

Abstract: The invention uses both heating and cooling zones to prevent the precipitation of solids onto equipment surfaces until they are efficiently removed from the gas phase via one or more heat exchangers. Each heat exchanger may be regenerated to melt off the solids when the amount collected becomes excessive. A storage plenum is available under each heat exchanger to store the melted solids until final removal to avoid the need to open the equipment for the removal of the unwanted solids.

Abstract: The apparatus and method of the present invention relates use of a warm and dry atmosphere in electronic component storage areas. The warm and dry atmosphere provides the benefit of eliminating the baking process and other moisture management issues by removing moisture from the components. In accordance with one aspect of the present invention, a component storage system includes an enclosed component storage area and a dry gas delivery system for delivery of a dry gas to the storage area to prevent moisture from being absorbed by the components, and a temperature control system for controlling a temperature of the dry gas to about 10° C. to about 60° C.

Abstract: Provided are methods and systems for controlling the concentration of a component in a composition, and semiconductor processing methods and systems. One exemplary method of controlling the concentration of a component in a composition involves: providing a composition which has a liquid portion, wherein the liquid portion contains a component to be monitored; performing an absorption spectroscopy measurement on a sample of the composition; and controlling the concentration of the component in the composition based on the absorption spectroscopy measurement using a feedback control loop. The invention allows for controlling the concentration of a component in a composition, for example, a corrosion inhibitor in a chemical planarization (CMP) chemical, as well as in pre- and post-CMP storage/treatment chemicals, and can provide real time, accurate process control in a simple and robust manner.

Abstract: An apparatus for extracting cooling power from helium flowing through a cooling system regenerator includes a heat exchanger disposed within the regenerator capable of extracting cooling power from the helium and a thermal link coupled to the heat exchanger for thermally coupling the heat exchanger with a component. A method of extracting cooling power from helium in a regenerator includes flowing the helium through a first portion of the regenerator, flowing the helium through a heat exchanger disposed between the first portion and a second portion of the regenerator to transfer heat from the heat exchanger to the helium, and transferring heat from a component via a thermal link to the heat exchanger.

Abstract: This invention relates to methods and apparatus for detecting, quantifying, and/or identifying trace quantities of an anion in the presence of an excess of another anion. One apparatus comprises a sample loop having a first end adapted to be connected to a sample-injection device and a second end adapted to be connected to an inlet of a first separator. An outlet of the first separator has connections to a first waste port and to an inlet of a first anion suppressor. An outlet of the first anion suppressor is connected to a first end of a concentrator and alternatively to waste, the concentrator connected at a second end to a second waste port and alternatively to a pump. The first end of the concentrator is alternatively connected to a second separator inlet, and the second separator is connected at an outlet thereof to an inlet of a second anion suppressor; and an outlet of the second anion suppressor is connected to a mass spectrometer.

Abstract: Methods and apparatus are presented for producing carbon black on a substrate. One preferred method includes providing a head assembly including a nozzle, the nozzle including a first injector for injecting a gas such as acetylene, and a second injector for injecting a mixture of a fuel and an oxidant to produce a pilot flame. The head assembly is indexed over a substrate on which is to be deposited carbon black. The acetylene is injected through the first injector, then through a pilot flame emitted from one or more second injectors, and finally toward a substrate to be coated with carbon black, but only when a deposit of carbon black is desired. The method includes ceasing the flow of acetylene, indexing the head assembly away from the substrate on which was just deposited the carbon black after a carbon black deposition sequence, and ceasing fuel gas and oxidant gas flows through the second injector.

Abstract: Provided are a preconditioned resin and methods of preparation thereof as well as methods for purifying hydrogen peroxide solutions. The method includes preconditioning an anion exchange resin, wherein an anion exchange resin bed is provided and carbon dioxide gas is passed through the resin bed.

Abstract: Gas separation membranes formed from polyester-polyether block copolymers which are useful for separating gases from gas mixtures. The membranes and processes are especially suited for separating polar gases from mixtures that contain polar and non-polar species. The novel membranes exhibit good permeability and permselectivity as well as durability, making them well suited for industrial applications such as removal of acid gases from natural gas and removal of carbon dioxide from synthesis gas.

Abstract: Process for welding together the two longitudinal edges of a sheet of austenitic, ferritic or martensitic stainless steel so as to obtain a welded pipe, employing at least one laser beam having a power ranging up to 12 kW, and in which a gas mixture is used that consists of 30% to 80% nitrogen by volume and of helium for the remainder (up to 100%). The stainless steel sheet has a thickness of 0.5 to 4 mm and the pipe obtained has a diameter of 5 mm to 50 cm. The welding is full-penetration welding.

Abstract: The invention provides a spinnerette assembly for forming hollow fibers. The spinnerette assembly contains an extrusion orifice and a fiber-forming material passage in communication with the extrusion orifice. A hollow needle extends through the extrusion orifice in a concentric manner to define an annular passage surrounding the needle. The fiber-forming material passage includes a fiber-forming material inlet port extending from a surface of the spinnerette assembly to an interior of the assembly and a transverse passage extending from the fiber-forming material port to the annular passage surrounding the needle. A bore forming fluid passage communicates with the interior of the needle.

Abstract: Provided are a method and apparatus for continuously blending a chemical solution for use in semiconductor processing. The method involves the step of: mixing a first chemical stream with a second chemical stream in a controlled manner, to form a stream of a solution having a predetermined formulation. The apparatus allows one to practice the above method. The method and apparatus can accurately provide chemical solutions of desired concentration in a continuous manner. The invention has particular applicability in semiconductor device fabrication.

Abstract: Methods of increasing the throughput of recovery boilers equipped with at least three levels of injection of air with oxygen enrichment of the air in at least one air level. In one method, a black liquor recovery boiler has three levels of air injection, and oxygen enrichment is applied to at least the secondary and the tertiary air injection levels. In another method, a black liquor recovery boiler has four levels of air injection, and oxygen enrichment is applied to one or more of the tertiary or quaternary air injection levels. In another method, a black liquor boiler has three levels of air injection, with oxygen enrichment applied to at least two air injection levels. After combustion, the oxygen concentration in the resultant flue gas is sensed. The oxygen injection is then adjusted in order to maintain the sensed oxygen concentration at the previously selected oxygen set point.

Abstract: A burner apparatus comprises a conduit adapted to convey preheated oxidant and having outlet and inlet ends, and a conduit adapted to convey preheated fuel and having outlet and inlet ends. The conduit adapted to convey preheated fuel is substantially parallel to the conduit adapted to convey preheated oxidant. The conduit adapted to convey preheated oxidant is positioned substantially vertically above the conduit adapted to convey preheated fuel. The conduit adapted to convey preheated oxidant and the conduit adapted to convey preheated fuel each are positioned within its own respective elongate cavity in a refractory burner block. Each of the conduits are positioned in their respective cavity such that a substantially annular region is present between an outer surface of each conduit and its respective cavity. Each conduit inlet end extends through a respective plenum for receiving an ambient temperature fluid, the plenums adapted to pass the ambient temperature fluid into the respective annular regions.

Abstract: Provided are apparatuses and methods for mixing gases. The apparatuses are suitable for use in the manufacture of an electronic device. The apparatuses include a gas mixing manifold. A first, bulk gas source is connected to introduce a flow of a first gas to the manifold. A second gas source is connected to introduce a flow of a second gas to the manifold. The first and second gases are mixed in the manifold, thereby forming a gas mixture. A conduit is connected to one or more point of use for introducing a flow of the gas mixture thereto. The present invention is particularly applicable in the semiconductor manufacturing industry.

Abstract: Provided are methods and systems for controlling the concentration of a component in a composition, and semiconductor processing methods and systems. One exemplary method of controlling the concentration of a component in a composition involves: providing a composition which has a liquid portion, wherein the liquid portion contains a component to be monitored; performing an absorption spectroscopy measurement on a sample of the composition; and controlling the concentration of the component in the composition based on the absorption spectroscopy measurement using a feedback control loop. The invention allows for controlling the concentration of a component in a composition, for example, a corrosion inhibitor in a chemical planarization (CMP) chemical, as well as in pre- and post-CMP storage/treatment chemicals, and can provide real time, accurate process control in a simple and robust manner.

Abstract: The invention provides a spinnerette assembly for forming multicomponenthollow fibers of the sheath/core type. The spinnerette assembly contains an extrusion orifice and a core forming material passage in communication with the extrusion orifice. A hollow needle extends through the extrusion orifice in a concentric manner to define an annular passage surrounding the needle. The core forming material passage includes a core forming material inlet port extending from a surface of the spinnerette assembly to an interior of the assembly and a transverse passage extending from the core forming material port to the annular passage surrounding the needle. A bore forming fluid passage communicates with the interior of the needle. The spinnerette assembly contains at least one sheath forming material passage also in communication with the extrusion orifice.