Abstract: Emission of characteristic electromagnetic radiation in the infrared, visible, or UV from excited particles, typically ions, molecules, or neutral atoms, desorbed from solid surfaces by an incident beam of low-momentum probe radiation has been observed. Disclosed is a method for characterizing solid surfaces based on the observed effect, with low-momentum probe radiation consisting of electrons or photons. Further disclosed is a method for controlling manufacturing processes that is also based on the observed effect. The latter method can, for instance, be advantageously applied in integrated circuit-, integrated optics-, and magnetic bubble device manufacture. Specific examples of applications of the method are registering of masks, control of a direct-writing processing beam, end-point detection in etching, and control of a processing beam for laser- or electron-beam annealing or ion implantation.

Abstract: Endpoint detection during plasma-assisted etching is signalled by cessation or onset of spatially confined luminescence resulting from an etch reaction product. Sensitivity of the system is aided by an optically focused detector which selectively detects such fluorescence as associated with one or a small number of lithographic features.

Abstract: Method for preventing spreading of a liquid on a solid surface, e.g., an adhesive placed on a substrate, and for preventing metal migration, in particular silver migration, between conductors deposited on a surface of a substrate, and articles produced by the method. The method comprises application of a layer of polymer having room temperature critical surface tension of wetting less than about 20 dyn/cm, and less than about 0.1 .mu.m thick, to at least a part of the surface. The polymer layer can be applied by any convenient method, including dipping, spraying, painting, printing, and plasma deposition. A preferred polymer is poly(1H, 1H-pentadecafluorooctyl methacrylate) (PDFOM), which can be advantageously applied in the form of a solution, typically in a fluorinated hydrocarbon such as Freon.RTM. TF, with PDFOM concentration typically between about 0.001% and about 2% by weight.

Abstract: Optical waveguides are formed in semiconductors, for example, InP and InGaAsP, by indiffusion of selected metal atoms.