Abstract: A method for achieving high flow in valves with small actuation distance is described. A detailed description for a silicon microvalve is provided. An algorithm is described for designing optimized valves.
Type:
Grant
Filed:
September 30, 2003
Date of Patent:
January 17, 2006
Assignee:
Redwood Microsystems
Inventors:
Albert K. Henning, Michael Selser, Bradford A. Cozad