Patents Represented by Law Firm Fish & Richard
  • Alpha-particle gas-pressure sensor
    Patent number: 5925823
    Abstract: Gas pressure in a chamber is determined by injecting alpha particles. The alpha particles ionize the gas. By determining a number of gas ions which are ionized, the pressure of the gas in the chamber can be determined.
    Type: Grant
    Filed: May 30, 1997
    Date of Patent: July 20, 1999
    Assignee: California Institute of Technology
    Inventors: Martin G. Buehler, L. Douglas Bell, Michael H. Hecht