Patents Represented by Attorney Fish & Richard P.C.

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  • Monolithic multiaxis interferometer
    Patent number: 6876451
    Abstract: A multi-axis interferometer includes a multiplexer portion and a beam splitter portion integrated into the same optically transmissive monolith. The multiplexer portion is configured to split an input beam into a corresponding plurality of intermediate beams, each of which is directed toward the beam splitter portion through a corresponding output port of the multiplexer portion. The beam splitter portion is configured to separate the intermediate beam into a measurement component and a reference component.
    Type: Grant
    Filed: August 27, 2001
    Date of Patent: April 5, 2005
    Assignee: Zygo Corporation
    Inventor: Andrew Eric Carlson