Abstract: The present invention provides a method for forming a film of aluminum oxide in which a target containing aluminum is sputtered in a gas containing fluorine atoms. The thin film of aluminum oxide according to the present invention has little optical absorption and high refractive index in the ultraviolet and vacuum ultraviolet regions.
Abstract: An endless film includes an endless film member; a rib having a JIS A hardness of not more than 100 degrees; an an adhesive layer between the film and the rib, the adhesive layer having a JIS A hardness after being cured.