Patents Represented by Law Firm Fitzpatrick, Cella, Harper & Fitzpatrick
  • Scanning exposure apparatus and device manufacturing method using the same
    Patent number: 5644383
    Abstract: A scanning exposure apparatus includes a supplying system for supplying exposure light to a substrate to be scanned in a direction. The exposure light has a predetermined intensity distribution in the direction of scan, a detecting device for detecting the light quantity of the exposure light, and a control system for controlling the supplying system on the basis of the light quantity and the predetermined intensity distribution of the exposure light.
    Type: Grant
    Filed: November 10, 1994
    Date of Patent: July 1, 1997
    Assignee: Canon Kabushiki Kaisha
    Inventor: Tetsuzo Mori