Abstract: In a process for producing toner particles by dispersing in an aqueous medium a polymerizable monomer composition containing at least a polymerizable monomer and a colorant and carrying out polymerization by the use of a polymerization initiator, the concentration of alcohol having 4 to 6 carbon atoms in the aqueous medium is so adjusted as to be from 500 ppm to 2,000 ppm when the polymerization conversion of the polymerizable monomer composition is 30%, and to be from 2,300 ppm to 10,000 ppm when the polymerization conversion of the polymerizable monomer composition is 97%.

Abstract: A method of determining relative position between a reflective reticle and a substrate includes a detection step of detecting relative position between a transmissive reference mark on a reticle stage and a substrate alignment mark on a substrate stage through a reflective optical system which projects a pattern of the reflective reticle onto the substrate with extreme ultraviolet light, and a determination step of determining relative position between the reflective reticle and the substrate based on the detection result in the detection step.