Abstract: A process for treating silicon-containing organic polymeric surfaces (e.g., spent, fluorosilane-containing, low-energy coatings) including applying a treatment composition comprising a fluorochemical compound. Preferably, the fluorochemical compound is a fluorinated silane having the following formula:R.sub.f --L--SiX.sub.3-x (R.sub.a).sub.xwherein: R.sub.f is a fluoroaliphatic group containing a perfluorinated terminal group; L is a covalent bond, a heteroatom, or an organic linking group; R.sub.a is an alkoxy group, an alkyl group, or an acyloxy group; X is a halide; and x is 0 to 3, with the proviso that when R.sub.a is an alkyl group, x is not 3.