Patents Represented by Attorney, Agent or Law Firm Francis J. Craufield
  • Patent number: 6201609
    Abstract: Interferometers utilizing polarization preserving optical systems by plane polarized beams are deviated through preselected angles without changing their linear state of polarization. The interferometers utilizing such optical systems have a variety of applications and are particularly suitable for use in the field of distance measuring interferometry (DMI) to enhance measurement accuracy by reducing undesirable polarization effects that can introduce errors associated with an otherwise present undesirable polarization rotation found in classical retroreflectors. Prismatic optical elements are preferably used to construct assemblies which can include polarization beam splitting coating arrangements and/or birefringent materials to enhance the extinction ratio between orthogonally polarized beams propagating through such systems.
    Type: Grant
    Filed: August 27, 1999
    Date of Patent: March 13, 2001
    Assignee: Zygo Corporation
    Inventors: Henry Allen Hill, Peter J. de Groot