Abstract: A planar plasma etcher (10) wherein a plurality of projections (36, 136, 236) extend from one electrode (18), with each projection aligned with a wafer (22) placed on the second electrode (20) to provide uniform etching across the surface of each wafer. The surface of the projection facing the wafer can take several forms depending on etching conditions, including convex, concave or frusto-conical.

Abstract: An actuating mechanism having three detented actuating positions. The actuating mechanism includes an arm having a roller rotatably mounted thereon. The roller bears against the sides of two juxtaposed coil springs which bias the arm into a neutral position when the roller is received between the springs, and an actuated position on either side of neutral when the roller rides past the centerline of one or the other of the springs. In accordance with one aspect of the invention, directional switches are actuated by the arm when the arm is moved to either side of neutral.

Abstract: A battery hold down device in the form of a frame made up of four parallel angle members engageable with opposed side edges of a pair of batteries placed side by side in a battery box. The ends of the angle members are connected by flat end plates, and the inner two angle members are attached to the end plates offset upwardly in relation to the outer angle members. Bolts extending between the batteries receive washers which engage the inner angle members. Nuts received over the washers are tightened down on the bolts, to clamp the batteries between the frame and the bottom of the battery box until the offset distance of the inner angle members is overcome, thus insuring a uniform preload along the four angle members.

Abstract: A device for filling a pneumatic tire has associated structure which will activate a warning device when the tire's internal pressure falls below a predetermined value. The device has a valve stem and core to provide the filling function, and a diaphragm actuated electrical switch which signals when the pressure within the tire has dropped below the predetermined value.

Abstract: An electro-hydraulic automatic seat brake system which is effective to automatically set the hydraulic service brakes and shut down the engine of an industrial vehicle whenever the operator's seat is unoccupied. In order to release the brakes after the seat is reoccupied, the operator must turn on the engine ignition circuit and close a separate brake release switch. The system is charged immediately upon starting the engine by means of an engine-driven pump before other hydraulic components can be operated, and the charge is maintained when the engine is shut down by means of an accumulator. According to one aspect of the invention the hydraulic pressure on the service brakes is automatically released when a mechanical handbrake is set. According to another aspect of the invention means are provided to allow the engine to keep running when the operator's seat is unoccupied, provided that the vehicle transmission is in a neutral condition.