Abstract: In a first embodiment of the invention a layer of ruthenium oxide is reactively deposited onto a substrate, then annealed for TCR adjustment and for stabilization. In a second, bi-layer embodiment of the invention, a layer of tantalum nitride is first reactively deposited onto a substrate, then annealed for stabilization. After a ruthenium oxide layer is reactively deposited onto the annealed tantalum nitride layer, the structure is annealed until a near-zero effective TCR for the bi-layer resistor is achieved. The ruthenium oxide capping layer serves as a barrier against chemical attack.
Type:
Grant
Filed:
November 9, 1993
Date of Patent:
December 17, 1996
Assignee:
Research Foundation of the State University of NY
Inventors:
Wayne Anderson, Franklyn M. Collins, Quanxi Jia, Kaili Jiao, Hoong J. Lee
Abstract: A composite is formed wherein particles of a conductive polymer are uniformly distributed within a processable non-conductive polymer. In the method of the invention, an inverted emulsion is formed by dispersing an aqueous solution of oxidant in an organic solvent comprising a host polymer and an oil-soluble surfactant. A monomer whose polymerization yields a conductive polymer which is dissolved in a solvent miscible with the organic solvent of the emulsion is then added dropwise to the emulsion with agitation. The composite is separated from the emulsion and the precipitate is washed and dried.