Patents Represented by Attorney, Agent or Law Firm Gerald J. Kita
  • Self-leveling pads and methods relating thereto
    Patent number: 6626740
    Abstract: A polishing pad having a soft layer with a porous structure impregnated with a relatively hard material that locally deforms irreversibly under polishing pressure to a substantially flat polishing pad surface.
    Type: Grant
    Filed: December 21, 2000
    Date of Patent: September 30, 2003
    Assignee: Rodel Holdings, Inc.
    Inventors: Arthur Richard Baker, III, Russell A. Walls, Jr., Stephen P. Carter, Jeffrey J. Hendron