Patents Represented by Attorney, Agent or Law Firm Gerlad K. Kita
  • Polishing pads and methods relating thereto
    Patent number: 6682402
    Abstract: This invention describes improved polishing pads useful in the manufacture of semiconductor devices or the like. The pads of the present invention have an advantageous hydrofoil polishing material and have an innovative surface topography and texture which generally improves predictability and polishing performance.
    Type: Grant
    Filed: November 10, 2000
    Date of Patent: January 27, 2004
    Assignee: Rodel Holdings, Inc.
    Inventors: John H. V Roberts, David B. James, Lee Melbourne Cook