Abstract: A method and structure for an integrated circuit structure that utilizes complementary fin-type field effect transistors (FinFETs) is disclosed. The invention has a first-type of FinFET which includes a first fin, and a second-type of FinFET which includes a second fin running parallel to the first fin. The invention also has an insulator fin positioned between the source/drain regions of the first first-type of FinFET and the second-type of FinFET. The insulator fin has approximately the same width dimensions as the first fin and the second fin, such that the spacing between the first-type of FinFET and the second-type of FinFET is approximately equal to the width of one fin. The invention also has a common gate formed over channel regions of the first-type of FinFET and the second-type of FinFET. The gate includes a first impurity doping region adjacent the first-type of FinFET and a second impurity doping region adjacent the second-type of FinFET.
Type:
Grant
Filed:
July 21, 2005
Date of Patent:
April 14, 2009
Assignee:
International Business Machines Corporation
Inventors:
Andres Bryant, William F. Clark, Jr., David M. Fried, Mark D. Jaffe, Edward J. Nowak, John J. Pekarik, Christopher S. Putnam